Plasma Temperature Control via Pre-cooled Gas
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Solution Overview
Problem
Current methods fail to achieve significant reduction in plasma temperature and lack the ability to accurately control plasma temperature over a wide range, particularly below room temperature, as they primarily rely on controlling electric power and gas flow rate.
Innovation Solution
A plasma temperature control apparatus and method that involves a plasma-generating gas temperature control section, which uses a cooling and heating section to adjust the temperature of the plasma-generating gas, allowing for precise control of plasma temperature by measuring and feedback-looping the plasma temperature.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If electric power supplied to plasma is reduced to lower plasma temperature, then plasma temperature decreases, but temperature control precision deteriorates and minimum achievable temperature is limited
Solution Approach 1:
The invention cools the plasma-generating gas before it enters the plasma generation chamber, performing the cooling action in advance. This preliminary cooling allows the plasma to achieve lower temperatures without requiring excessive reduction of electric power, thereby improving temperature control precision while achieving the desired low plasma temperature state
2Temperature
If gas flow rate is increased to reduce plasma temperature, then plasma temperature decreases, but energy efficiency deteriorates and temperature range is limited
Solution Approach 1:
Instead of increasing gas flow rate to reduce plasma temperature, the invention pre-cools the plasma-generating gas before injection. This approach reduces the energy required for plasma generation while achieving the same temperature reduction effect, thereby improving energy efficiency and enabling broader temperature control range
3Adaptability or versatility
If conventional plasma generation methods are used, then plasma can be generated, but temperature control range is limited and cannot achieve below-room temperature
Solution Approach 1:
The invention introduces a pre-cooling stage for the plasma-generating gas before it enters the plasma generation chamber. This preliminary cooling action extends the achievable plasma temperature range to below-room temperature, significantly improving adaptability for various applications requiring different temperature conditions
Solution Approach 2:
The invention uses cooled plasma-generating gas as an intermediary medium to transfer the cooling effect to the plasma. By pre-cooling the gas that will become plasma, the system achieves extended temperature control range without directly cooling the plasma itself, enabling temperatures below room temperature
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the generation of plasma at temperatures below 0 °C and precise control over a wide temperature range from low to high temperatures, enhancing applications in various fields such as surface treatments and vapor phase synthesis.
Implementation Method 1
a cooling and heating section to cool and heat the plasma-generating gas
Implementation Method 2
a plasma generating section to generate plasma from the plasma-generating gas
Data Source
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AI summary
The plasma temperature control apparatus includes a plasma generating section 40 that turns a plasma-generating gas into plasma, and a plasma-generating gas temperature control section 30 that controls the temperature of the plasma-generating gas supplied to the plasma generating section 40. The temperature of the plasma generated in the plasma generating section 40 is controlled by controlling the temperature of the plasma-generating gas.