Plasma-Treated Inorganic Insulating Layer for EL Display Moisture Barrier
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Solution Overview
Problem
Electroluminescence (EL) elements in display devices suffer from deterioration in luminance and evenness over time due to water and oxygen penetration, leading to low reliability and limited practical application.
Innovation Solution
A manufacturing method for display devices involves forming a semiconductor layer, gate insulating layer, and electrode layers, followed by the application of inorganic insulating layers and plasma treatment to create a dense film structure that prevents moisture and oxygen ingress, enhancing the reliability and performance of the EL element.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If inorganic insulating material is used to isolate pixels, then insulation between pixels is achieved, but water and oxygen penetration still occurs leading to EL element deterioration
Solution Approach 1:
The patent divides the insulating structure into multiple segments: a first inorganic insulating layer, a second inorganic insulating layer, and an organic insulating layer positioned between them. This segmented approach creates multiple barriers against water and oxygen penetration, addressing the limitation of using a single inorganic insulating material while maintaining pixel isolation functionality.
Solution Approach 2:
The patent employs a composite insulating structure combining different materials (inorganic and organic insulating layers) with complementary properties. The inorganic layers provide baseline insulation and barrier properties, while the organic layer fills gaps and provides additional protection, creating a synergistic effect that prevents water and oxygen penetration more effectively than single materials alone.
2Object-affected harmful factors
If plasma treatment is applied to inorganic insulating layer and electrode, then dense film structure is formed preventing moisture ingress, but manufacturing process complexity increases
Solution Approach 1:
The patent applies plasma treatment to the inorganic insulating layer and electrode before assembling the complete display structure. This preliminary action creates a dense, moisture-resistant surface on these components beforehand, ensuring protection against moisture ingress is established early in the manufacturing process rather than requiring complex post-assembly treatments.
Solution Approach 2:
The plasma treatment process modifies the physical and chemical parameters of the inorganic insulating layer and electrode surface, creating a denser film structure with altered surface properties that resist moisture penetration. This parameter change approach provides effective moisture protection through a relatively simple surface treatment step rather than requiring complex structural modifications.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method results in a highly reliable display device with improved luminance and evenness, achieving high resolution and performance while maintaining high yields.
Implementation Method 1
subjecting the inorganic insulating layer and the first electrode layer to plasma treatment
Data Source
AI summary
According to one feature of the present invention, a display device is manufactured according to the steps of forming a semiconductor layer; forming a gate insulating layer over the semiconductor layer; forming a gate electrode layer over the gate insulating layer; forming source and drain electrode layers in contact with the semiconductor layer; forming a first electrode layer electrically connected to the source or drain electrode layer; forming an inorganic insulating layer over part of the first electrode layer, the gate electrode layer, the source electrode layer, and the drain electrode layer; subjecting the inorganic insulating layer and the first electrode layer to plasma treatment; forming an electroluminescent layer over the inorganic insulating layer and the first electrode layer which are subjected to plasma treatment; and forming a second electrode layer over the electroluminescent layer.