Plasma Treatment Device with Split Operating Agent Supply
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing methods for plasma treatment of workpieces, such as plasma coating and sterilization, are not suitable for mass production due to high costs and low production rates, requiring improvements in operating agent supply and chamber design for efficient and reliable processes.
Innovation Solution
The method involves splitting a stream of operating agents into multiple streams to supply multiple plasma chambers simultaneously, allowing for a compact and efficient design with reduced process idle times, achieved by connecting chambers to a junction for splitting the agent streams and using a rotating plasma wheel for high production rates.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a single stream of operating agents is used to supply plasma chambers, then the device construction is simple, but the production rate is low and process idle times are long
Solution Approach 1:
The single stream of operating agents is segmented into multiple split streams through a junction, allowing simultaneous supply to multiple plasma chambers. This segmentation enables parallel processing of multiple workpieces, thereby increasing the production rate while maintaining manageable device complexity through modular connection.
Solution Approach 2:
The junction serves as a universal distribution point that can supply operating agents to multiple plasma chambers simultaneously. This multi-functional component allows a single operating agent supply system to serve multiple chambers, increasing productivity without proportionally increasing the complexity of the supply system.
2Loss of time
If multiple plasma chambers are supplied sequentially from a single stream, then the device construction is simple, but the process idle times increase
Solution Approach 1:
The operating agent stream is segmented at the junction into multiple concurrent streams, allowing all plasma chambers to be supplied simultaneously rather than sequentially. This eliminates waiting time between chamber supplies and reduces process idle times, while the connecting ducts remain relatively short due to the compact junction design.
3Productivity
If the plasma chamber arrangement is expanded for high production, then the production rate increases, but the equipment cost increases
Solution Approach 1:
Multiple plasma chambers are merged into a single integrated system through the common junction for operating agent supply. This allows simultaneous operation of multiple chambers using shared infrastructure, increasing production rate while avoiding the need for completely separate supply systems for each chamber, thereby controlling equipment costs.
Solution Approach 2:
The junction and operating agent supply system serve multiple plasma chambers simultaneously, creating a universal supply infrastructure. This multi-functional design allows one supply system to support multiple chambers, increasing productivity without proportionally increasing the cost of supply equipment.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables a high production rate with high reliability and product quality, reducing equipment expenses and process idle times, while promoting good surface adhesion and barrier properties through efficient plasma polymerization and sterilization.
Implementation Method 1
plasma treatment of workpieces... plasma polymerization... promote good surface adhesion and barrier properties
Implementation Method 2
Devices for plasma sterilization are also well known... plasma treatment... sterilization
Data Source
AI summary
Disclosed are a method and a device for plasma treating workpieces (5). Said workpiece is inserted into a chamber (7) of a treatment station (3), which can be at least partly evacuated, and is positioned within the treatment station by means of a holding element. In order to simultaneously supply at least two chambers with at least one operating means, a flow of the operating means is branched at least once so as to form at least two partial flows (55).