Plasma Treatment Apparatus Vertical Tray Conveyance
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Solution Overview
Problem
Existing roll-to-roll type plasma treatment apparatuses face difficulties in applying continuous film formation treatments to base materials with irregularities or thick substrates that are difficult to wind on a roll.
Innovation Solution
A plasma treatment apparatus with multiple chambers and a lift mechanism that holds the base material in a standing posture, allowing continuous conveyance through a tray system, enabling both surfaces to be treated efficiently, and maintaining a desired vacuum level between chambers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a roll-to-roll type plasma treatment apparatus is used for continuous film formation, then treatment speed and manufacturing efficiency are improved, but it cannot be applied to base materials with irregularities or thick substrates that are difficult to wind on a roll
Solution Approach 1:
The apparatus divides the continuous treatment process into discrete segments by using multiple plasma treatment chambers (first chamber, second chamber, third chamber) arranged in series. The base material is processed sequentially through each chamber while maintaining continuous movement, allowing both regular and irregular substrates to be treated without requiring them to be wound on rolls.
Solution Approach 2:
The invention transitions from a horizontal roll-to-roll configuration to a vertical processing configuration where base materials are held in a standing posture within trays. This dimensional change allows materials with irregularities or thick substrates to be processed continuously without the constraint of being wound on rolls, while still maintaining high throughput through the multi-chamber sequential treatment.
2Productivity
If multiple plasma treatment chambers are used for continuous treatment of both surfaces, then manufacturing efficiency is improved, but device complexity increases
Solution Approach 1:
The apparatus merges multiple plasma treatment chambers into a single integrated system with a unified vacuum environment. The chambers are connected through a common vacuum space, allowing trays to move continuously between chambers without breaking vacuum, thereby reducing the need for multiple separate vacuum systems and simplifying the overall device structure while maintaining high manufacturing efficiency.
Solution Approach 2:
Each plasma treatment chamber is designed with universal functionality to treat both surfaces of the base material. The chambers can process different types of base materials (regular substrates and materials with irregularities) using the same plasma treatment mechanism, reducing the need for specialized equipment for different material types and simplifying the overall apparatus design.
3Productivity
If trays holding base material are continuously conveyed through multiple chambers, then continuous treatment is achieved, but maintaining vacuum levels between chambers becomes more difficult
Solution Approach 1:
The invention merges multiple plasma treatment chambers into a single interconnected vacuum system. By connecting the chambers through a common vacuum space, the system maintains a unified vacuum level across all chambers, eliminating the complexity of maintaining separate vacuum levels in each chamber while enabling continuous tray conveyance through all chambers.
Solution Approach 2:
The common vacuum space acts as an intermediary that connects all plasma treatment chambers. This intermediary space allows trays to move continuously between chambers while maintaining the vacuum environment, as the chambers communicate with each other through this shared vacuum zone rather than requiring separate vacuum maintenance for each chamber.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables continuous plasma treatment of base materials challenging to wind, achieving high efficiency and uniform film formation on both surfaces, even for materials with irregularities or thickness issues.
Implementation Method 1
a plurality of plasma treatment chambers S2 to S6 in which a plasma treatment is performed on a base material X
Data Source
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AI summary
A plasma treatment apparatus includes a plurality of plasma treatment chambers S2 to S6 in which a plasma treatment is performed on a base material X, a tray Y configured to hold the base material X in a standing posture, and a lift mechanism 10 configured to continuously convey the tray Y to the plurality of plasma treatment chambers S2 to S6 in order to continuously perform a plasma treatment even when the base material is difficult to wind on a roll.