Plasma View Port Monitoring With Calibrated Optical Cable Fastening
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Solution Overview
Problem
Existing substrate treating apparatuses face challenges in accurately detecting the end point of plasma treatment due to impurities depositing on view ports and variations in optical cable connections, leading to inconsistent light signal analysis.
Innovation Solution
Incorporation of a measurement member with a scale to measure and standardize the fastening length of optical cables, allowing for calibrated peak data analysis to accurately detect the end point of treatment, even with impurities present.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If light collection is performed through a view port during plasma treatment, then plasma characteristics can be monitored, but impurities deposit on the view port reducing light transmission
Solution Approach 1:
The patent extracts the light collection function from the view port path by using an optical cable to transmit light signals externally. The light collection unit collects light through the view port, but the optical cable carries the light signal outside the chamber, separating the detection function from the chamber environment where impurities accumulate.
Solution Approach 2:
The optical cable acts as an intermediary medium between the view port and the analysis unit. It transmits light signals from the plasma treatment zone to the external analysis system, allowing monitoring without direct exposure to impurities in the treatment chamber.
2Ease of repair
If optical cable connection is detached and reattached during maintenance, then device maintenance can be performed, but fastening length variation causes light signal intensity changes
Solution Approach 1:
The patent records the fastening length of the optical cable before maintenance as reference data. This preliminary recording allows the operator to restore the exact same fastening condition after maintenance, ensuring consistent light signal intensity without requiring complex calibration procedures.
Solution Approach 2:
The system uses the recorded fastening length as feedback information to guide the reconnection process. By comparing the actual fastening length with the recorded reference value, the operator can adjust the connection to achieve the correct positioning, ensuring reproducible measurement conditions.
3Ease of operation
If optical cable fastening length varies, then cable reconnection flexibility is improved, but light signal transmission stability deteriorates
Solution Approach 1:
The patent records the correct fastening length before maintenance activities. This preliminary documentation provides a reference standard that guides the reconnection process, allowing operators to easily restore the optimal connection condition without requiring complex adjustment procedures or specialized skills.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Ensures uniform substrate treatment and precise detection of the end point, maintaining accurate light analysis despite impurities and cable connection variations.
Implementation Method 1
a plasma source 1400 for generating plasma in the treating space by exciting the gas supplied to the treating space
Implementation Method 2
an optical cable having a connection terminal fastened to the light collection unit formed at one end to transmit the light
Implementation Method 3
the end point of the treating is determined by analyzing a peak of the light emitted from the plasma
Data Source
AI summary
Disclosed is an apparatus for treating a substrate. The substrate treating apparatus may include a chamber for generating plasma in a treating space and treating a substrate using the plasma, and a measurement unit for monitoring light emitted from the plasma of the treating space, in which the measurement unit may include a light collection unit for collecting the light passing through a view port formed on one side wall of the chamber; and an optical cable having a connection terminal fastened to the light collection unit formed at one end to transmit the light, in which a measurement member capable of measuring a fastening length between the light collection unit and the optical cable is disposed in the connection terminal.