Plasmon Generator Manufacturing via Laser Annealing

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Solution Overview

Problem

Conventional plasmon generators used in thermally-assisted magnetic recording experience reliability issues due to temperature-induced deformation caused by crystal grain aggregation, affecting their heating capability.

Innovation Solution

A manufacturing method for plasmon generators involves forming an initial metal polycrystal film, heating it with laser light to allow crystal grains to grow, and then processing it to create a plasmon generator with a stable front end face, preventing deformation and enhancing reliability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Power

If the plasmon generator is heated during operation to generate near-field light, then the heating capability is improved, but the crystal grains aggregate and grow causing deformation that reduces reliability

Engineering Contradiction:
Improveheating capabilityVSAvoidreliability
Core Design Contradiction:
PowerVSReliability

Solution Approach 1:

The patent applies preliminary action by pre-heating the initial metal film before forming the plasmon generator structure. This pre-heating treatment modifies the crystal grain structure in advance, creating a more stable microstructure that resists deformation during subsequent operational heating, thus preventing the reliability degradation that would normally occur from thermal cycling

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent employs parameter changes by controlling the heating temperature and duration to achieve specific crystal grain growth characteristics. By adjusting these thermal parameters, the material transforms from an unstable fine-grained structure to a stable coarser-grained structure that maintains dimensional stability under operational conditions, resolving the contradiction between heating capability and reliability

Inventive Principle:
Principle #35Parameter changes

2Stability of the object's composition

If the crystal grains are allowed to grow during operation, then the material becomes more stable, but the plasmon generator deforms and loses heating capability

Engineering Contradiction:
Improvematerial stabilityVSAvoidshape stability
Core Design Contradiction:
Stability of the object's compositionVSShape

Solution Approach 1:

The patent performs preliminary heating treatment before the plasmon generator is formed, which establishes a stable crystal grain structure in advance. This pre-established structure prevents subsequent deformation that would otherwise occur during operational heating, thereby maintaining both material stability and shape integrity throughout the device lifecycle

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent applies beforehand cushioning by pre-heating the metal film to create a buffer against thermal stress. The preliminary thermal treatment creates a more resilient crystal structure that can withstand subsequent thermal cycling without deforming, effectively cushioning against the harmful effects of operational heating on shape stability

Inventive Principle:
Principle #11Beforehand cushioning (Prior cushioning)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The method produces plasmon generators with improved reliability and stability, maintaining effective heating performance without compromising the characteristics of other components like the magnetoresistive element.

Implementation Method 1

heating the initial film with heating light so that a plurality of crystal grains constituting the metal polycrystal grow

Methodology Applied
Scientific EffectLaser heating: Laser

Implementation Method 2

heating the initial film with heating light so that a plurality of crystal grains constituting the metal polycrystal grow

Methodology Applied
Scientific EffectCrystal grain growth: Annealing

Implementation Method 3

Surface plasmons are excited on the plasmon generator and propagate along the surface of the plasmon generator to reach the front end face

Methodology Applied
Scientific EffectSurface plasmon excitation:

Implementation Method 4

the surface plasmons concentrate at the front end face, and near-field light is generated from the front end face based on the surface plasmons

Methodology Applied
Scientific EffectNear-field light generation:

Implementation Method 5

Part of the energy of light guided to the plasmon generator through the waveguide is transformed into heat in the plasmon generator. Part of the energy of near-field light generated by the plasmon generator is also transformed into heat in the plasmon generator

Methodology Applied
Scientific EffectPhotothermal conversion: Heating

Data Source

PatentUS9640202B2Method of manufacturing plasmon generator
Publication Date: 2017.05.02 HEADWAY TECHNOLOGIES INC
  • US9640202B2 patent drawing
  • US9640202B2 patent drawing
  • US9640202B2 patent drawing

AI summary

A method of manufacturing a plasmon generator includes the steps of: forming an initial film made of a metal polycrystal and including a pre-plasmon-generator portion that later becomes the plasmon generator; heating the initial film with heating light so that a plurality of crystal grains constituting the metal polycrystal grow at least in the pre-plasmon-generator portion; stopping the heating of the initial film; and forming the plasmon generator by processing the initial film after the step of stopping the heating. The step of forming the plasmon generator includes the step of providing the pre-plasmon-generator portion with a front end face that generates near-field light.