Thermal-Assisted Magnetic Write Head Plasmon Generator Protection

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Solution Overview

Problem

The existing thermally-assisted magnetic write heads face challenges in maintaining sufficient near-field light intensity and stability due to the tendency of plasmon generators, primarily made of materials like gold, silver, or copper, to be removed during etching processes, leading to instability and reduced recording efficiency.

Innovation Solution

A manufacturing method for a thermally-assisted magnetic write head involves forming a laminate structure with a waveguide, plasmon generator, and magnetic pole, followed by a first etching process to recess the plasmon generator behind the waveguide, and then filling the recessed area with a protection layer to create a flat air bearing surface, ensuring stable near-field light generation and transmission.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Illumination intensity

If plasmon generator is made of gold, silver, or copper for near-field light generation, then light generation capability is improved, but material is removed during etching process causing instability

Engineering Contradiction:
Improvenear-field light intensityVSAvoidstructural stability
Core Design Contradiction:
Illumination intensityVSReliability

Solution Approach 1:

A protection layer is introduced as an intermediary between the plasmon generator and the etching environment. This protection layer prevents direct contact between the etchant and the plasmon generator material (gold, silver, or copper), thereby preventing material removal while allowing the plasmon generator to maintain its light generation function. The protection layer acts as a mediator that shields the sensitive plasmon generator during the etching process.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The protection layer is formed beforehand to cushion or protect the plasmon generator from the harmful effects of the etching process. By preparing this protective barrier in advance, the plasmon generator is shielded from material removal that would otherwise occur during etching, ensuring structural stability is maintained before the etching process begins.

Inventive Principle:
Principle #11Beforehand cushioning (Prior cushioning)

2Illumination intensity

If plasmon generator is recessed behind waveguide for proper positioning, then near-field light transmission is improved, but air bearing surface flatness deteriorates

Engineering Contradiction:
Improvenear-field light transmissionVSAvoidair bearing surface flatness
Core Design Contradiction:
Illumination intensityVSManufacturing precision

Solution Approach 1:

The protection layer is applied selectively to specific regions where recesses are formed. Rather than uniformly covering the entire surface, the protection layer is localized to the recessed areas around the plasmon generator, allowing the rest of the air bearing surface to maintain its required flatness while providing protection only where the plasmon generator is recessed.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The solution moves from a two-dimensional flat surface problem to a three-dimensional solution by forming recesses and filling them with protection layer material. This dimensional change allows the plasmon generator to be positioned behind the waveguide for proper light transmission while the protection layer fills the vertical space to restore the horizontal flatness of the air bearing surface.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Quantity of substance

If magnetic particles are reduced in size for increased recording density, then recording capacity is improved, but thermal stability of magnetization deteriorates

Engineering Contradiction:
Improverecording densityVSAvoidthermal stability of magnetization
Core Design Contradiction:
Quantity of substanceVSStability of the object's composition

Solution Approach 1:

The invention changes the physical parameters of the magnetic particles by increasing their anisotropic energy. This parameter change allows smaller magnetic particles to maintain sufficient thermal stability despite their reduced size. By modifying the anisotropic energy parameter, the system achieves both high recording density (through smaller particles) and thermal stability (through increased anisotropic energy).

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method enhances the intensity and stability of near-field light, improving recording efficiency and reliability by maintaining the integrity of the plasmon generator and waveguide configuration, thus addressing the issues of coercive force and thermal stability in magnetic recording.

Implementation Method 1

a plasmon generator provided between the magnetic pole and the waveguide for generating a near-field light from the air bearing surface based on the light transmitted over the waveguide

Methodology Applied
Scientific EffectNear-field light generation:

Implementation Method 2

a first polishing process to planarize an end surface of the laminate structure

Methodology Applied
Scientific EffectPolishing:

Implementation Method 3

forming a recessed region on the end surface of the laminate structure by a first etching process of removing any impurities attached on the end surface of the laminate structure

Methodology Applied
Scientific EffectEtching:

Implementation Method 4

forming a protection layer on the end surface of the laminate structure to fill at least the recessed region

Methodology Applied
Scientific EffectDeposition: Deposition (physical)

Implementation Method 5

forming the air bearing surface by starting a second polishing process on the end surface of the laminate structure formed with the protection layer

Methodology Applied
Scientific EffectPolishing:

Data Source

PatentUS8578593B2Method of manufacturing thermal assisted magnetic write head
Publication Date: 2013.11.12 TDK CORP
  • US8578593B2 patent drawing
  • US8578593B2 patent drawing
  • US8578593B2 patent drawing

AI summary

A method of manufacturing a thermally-assisted magnetic write head is provided. The method includes steps of: forming a laminate structure including the waveguide; the plasmon generator, and the magnetic pole in order; performing a first polishing process to planarize an end surface of the laminate structure; performing a first etching process to remove impurity attached on the end surface of the laminate structure, and to allow the plasmon generator to be recessed from the waveguide and the magnetic pole, thereby forming a recessed region on the end surface of the laminate structure; forming a protection layer on the end surface of the laminate structure such that at least the recessed region is filled; and performing a second polishing process on the end surface of the laminate structure formed with the protection layer until the plasmon generator is exposed, thereby completing the air bearing surface.