Anti-Reflection Structure Using Surface Plasmons and High-K Dielectric

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Solution Overview

Problem

Current anti-reflection structures in optical devices are ineffective in reducing reflectance, particularly in utilizing surface plasmons and high-k dielectric materials to enhance light absorption and transmission efficiency.

Innovation Solution

The proposed solution involves an anti-reflection structure comprising a high-k dielectric layer and a nano-material layer, including metal nanoparticles or nanorods, which are formed on a substrate, allowing for selective control of light absorption and transmission by utilizing surface plasmons. The high-k dielectric layer can be made of materials like zirconium oxide, hafnium oxide, or titanium oxide, and the nano-material layer is created through processes such as heat treatment of metal thin films or coating nano-structures.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Object-affected harmful factors

If conventional anti-reflection structures are used, then manufacturing is simple, but reflectance reduction is ineffective

Engineering Contradiction:
ImprovereflectanceVSAvoidstructure complexity
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The patent combines high-k dielectric materials (such as zirconium oxide, hafnium oxide, titanium oxide) with metal nanoparticle layers to create a composite anti-reflection structure. This composite approach leverages the high dielectric constant of the dielectric layer for enhanced light absorption and the surface plasmon effect of metal nanoparticles for selective wavelength control, achieving superior reflectance reduction compared to conventional single-material structures.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The patent introduces nanoscale metal particles (gold, silver, aluminum, or copper) with specific size ranges (10-100 nm diameter) into the anti-reflection structure. These nanoparticles exhibit localized surface plasmon resonance that selectively absorbs specific wavelengths of light, providing wavelength-dependent anti-reflection properties. The local quality of each nanoparticle contributes to overall enhanced light management across different spectral regions.

Inventive Principle:
Principle #3Local quality

2Use of energy by moving object

If metal nanoparticle layer is added to utilize surface plasmons, then light absorption control is improved, but manufacturing complexity increases

Engineering Contradiction:
Improvelight absorption efficiencyVSAvoidmanufacturing ease
Core Design Contradiction:
Use of energy by moving objectVSEase of manufacture

Solution Approach 1:

The patent employs preliminary action by first forming the high-k dielectric layer on the substrate, then subsequently forming the metal nanoparticle layer through controlled deposition and heat treatment. This sequential approach allows each layer to be optimized independently - the dielectric layer provides a stable foundation with high light absorption capability, while the metal nanoparticles are then deposited on top to provide selective wavelength control through surface plasmon resonance.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent utilizes parameter changes by controlling the size, shape, and material composition of metal nanoparticles (10-100 nm diameter spheres, rods, or other geometries) to tune the surface plasmon resonance characteristics. By adjusting nanoparticle parameters such as diameter, aspect ratio, and material type (Au, Ag, Al, Cu), the structure can be optimized for different wavelength regions, enabling versatile light absorption control while maintaining manufacturability through standard nanofabrication techniques.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration reduces reflectance and improves light use efficiency in optical devices, such as solar cells and LEDs, by selectively controlling light transmittance and absorption based on wavelength, thereby enhancing their performance.

Implementation Method 1

Surface plasmons refer to plasmons resulting from strong interaction between free electrons, which are confined to a surface of a metal, and incident light. When a fine structure of a surface of an object is changed, the types of surface plasmons may be changed, and thus, wavelengths of light absorbed by a material may also be changed.

Methodology Applied
Scientific EffectSurface plasmon:

Implementation Method 2

Because light absorption by metal nanoparticles occurs when free electrons couple to light (electromagnetic field) in visible and near-infrared wavelength regions, colors may be selectively controlled.

Methodology Applied
Scientific EffectLight absorption: Absorption (EM radiation)

Data Source

PatentUS8953243B2Anti-reflection structure using surface plasmon and high-K dielectric material and method of manufacturing the anti-reflection structure
Publication Date: 2015.02.10 SAMSUNG ELECTRONICS CO LTD
  • US8953243B2 patent drawing
  • US8953243B2 patent drawing
  • US8953243B2 patent drawing

AI summary

An anti-reflection structure using surface plasmons and a high-k dielectric material, and a method of manufacturing the anti-reflection structure. The anti-reflection structure may include a high-k dielectric layer formed on a substrate, the high-k dielectric layer configured to allow incident light to pass therethrough, and a nano-material layer on the high-k dielectric layer. The high-k dielectric layer may include at least one of zirconium oxide (ZrO2), hafnium oxide (HfO2), titanium oxide (TiO2), tantalum oxide (Ta2O5), lanthanum oxide (La2O3), yttrium oxide (Y2O3) and aluminum oxide (Al2O3).