Plasmon Tomography Surface Profiling Attenuation
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Solution Overview
Problem
Current methods for determining distances between surfaces using surface plasmon tomography face challenges in accurately measuring relative and absolute distances due to variations in plasmon energy attenuation along different paths, which affects the precision of surface profiling and alignment.
Innovation Solution
The method involves exciting plasmon resonances on a first surface and detecting the energy at measurement positions, determining attenuation along multiple paths, and using this data to calculate relative and absolute distances between the surfaces, with the option to adjust surface positions based on detected plasmon energy levels, employing optical energy sources, detectors, and processors to align and measure the surfaces effectively.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If surface plasmon tomography is used to determine distances between surfaces, then surface profiling capability is achieved, but measurement precision deteriorates due to variations in plasmon energy attenuation along different paths
Solution Approach 1:
The patent segments the measurement process by dividing the surface into multiple discrete measurement positions and determining distances at each position independently. This segmentation allows for localized compensation of attenuation variations, where each measurement point can be calibrated separately, thereby maintaining measurement precision across the entire surface while preserving comprehensive profiling capability.
Solution Approach 2:
The patent changes the parameter being measured from absolute plasmon energy to the ratio or relative change of plasmon energy between different paths. By measuring relative changes rather than absolute values, the system becomes insensitive to variations in attenuation along different paths, thus maintaining measurement precision while enabling surface profiling through systematic variation of measurement positions.
2Manufacturing precision
If multiple measurement paths are used to determine distances, then surface profiling accuracy is improved, but device complexity increases due to multiple excitation and detection positions required
Solution Approach 1:
The patent implements multi-functionality by using a single excitation source that can excite plasmons at multiple positions and a single detector that can detect plasmon energy from multiple paths. The system achieves multiple measurement capabilities through spatial modulation and signal processing rather than requiring separate excitation sources and detectors for each measurement path, thereby maintaining surface profiling accuracy while reducing device complexity.
Solution Approach 2:
The patent transitions from measuring distance at a single point to measuring distances across a two-dimensional surface by introducing spatial distribution of measurement positions. This dimensional expansion allows comprehensive surface profiling to be achieved by systematically varying the measurement positions in space, with the data from multiple positions being processed to reconstruct the complete surface profile, thereby achieving high profiling accuracy without proportionally increasing device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances the precision of surface profiling and alignment by accurately determining distances and adjusting surface positions to achieve desired plasmon energy levels, improving the accuracy of surface imaging and pattern transfer in applications like photonic crystals and semiconductor materials.
Implementation Method 1
producing plasmon energy by exciting a plasmon resonance at least one excitation position on a first surface of a first material
Implementation Method 2
detecting the plasmon energy at least one measurement position on the first surface after the plasmon energy has propagated from the at least one excitation position to the at least one measurement position
Implementation Method 3
determining an attenuation of plasmon energy along a plurality of paths between the at least one excitation position and the at least one measurement position
Data Source
AI summary
Plasmon energy is produced by exciting a plasmon resonance at least one excitation position on a first surface of a first material, and the plasmon energy is detected at at least one measurement position on the first surface after the plasmon energy has propagated from the at least one excitation position to the at least one measurement position. An attenuation of plasmon energy is determined along a plurality of paths between the at least one excitation position and the at least one measurement position, and relative distances between the first surface and a second surface of a second material are determined at a plurality of points on at least one of the surfaces based on the determined attenuation of plasmon energy along the plurality of paths.