Spectrometer Using Plasmonic Filter Array for Miniaturization

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Solution Overview

Problem

Conventional spectrometers face challenges in miniaturization, process reproducibility, resolution limitations, and material constraints, particularly in the mid-infrared wavelength band, due to the linear structure of linear variable filters and interference filters, which hinder two-dimensional integration and broadband operation.

Innovation Solution

A spectrometer design utilizing a spectral filter array with unit spectral filters having stop band characteristics, composed of periodically arranged metal patterns, which absorb or reflect specific wavelength bands, allowing for two-dimensional integration and improved durability, and a processing unit to restore the target light spectrum from detected signals.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If a linear variable filter (LVF) with linear structure is used, then the spectrometer can be miniaturized, but the process reproducibility deteriorates and two-dimensional integration becomes difficult

Engineering Contradiction:
Improvespectrometer sizeVSAvoidprocess reproducibility
Core Design Contradiction:
Volume of moving objectVSManufacturing precision

Solution Approach 1:

The spectral filtering function is segmented into multiple discrete unit spectral filters arranged in an array, where each filter handles a specific wavelength band. This segmentation allows each filter to be manufactured independently with consistent quality, improving process reproducibility while maintaining compact size through two-dimensional arrangement.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The filter array transitions from a one-dimensional linear structure to a two-dimensional arrangement, allowing spectral filtering to be achieved through spatial distribution in both horizontal and vertical directions. This dimensional change enables better integration with two-dimensional detector arrays and improves manufacturing consistency.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Adaptability or versatility

If conventional interference filters are used, then the spectrometer can operate in mid-infrared band, but the material selection is limited and thermal stability deteriorates

Engineering Contradiction:
Improvewavelength band coverageVSAvoidthermal stability
Core Design Contradiction:
Adaptability or versatilityVSReliability

Solution Approach 1:

The spectral filters are constructed using composite material systems combining metal patterns (such as gold, silver, or aluminum) with dielectric layers. This composite structure enables simultaneous achievement of desired optical filtering characteristics in mid-infrared band and improved thermal stability, as the metal-dielectric combination provides both plasmonic resonance control and thermal resistance.

Inventive Principle:
Principle #40Composite materials

3Measurement precision

If Fabry-Perot filter with multiple dielectric resonance layers is used, then the wavelength filtering can be achieved, but the number of litho process steps increases and manufacturing complexity deteriorates

Engineering Contradiction:
Improvewavelength filtering precisionVSAvoidnumber of litho process steps
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The complex multi-layer dielectric resonance structure is replaced by extracting and utilizing plasmonic resonance from metal patterns. This extraction of the core resonant function to a simpler metal-pattern-based structure reduces the number of lithography steps and manufacturing complexity while maintaining wavelength filtering precision through plasmonic resonance control.

Inventive Principle:
Principle #2Taking out (Extraction)

4Volume of moving object

If LVF with linear structure is used, then the spectrometer can be compact, but the resolution is limited by height-to-length ratio and further downsizing becomes difficult

Engineering Contradiction:
Improvespectrometer sizeVSAvoidspectral resolution
Core Design Contradiction:
Volume of moving objectVSMeasurement precision

Solution Approach 1:

The spectral resolution is improved by utilizing two-dimensional spatial distribution of filters instead of one-dimensional linear arrangement. This allows the spectrometer to achieve high resolution without increasing the height-to-length ratio, enabling further miniaturization while maintaining or improving spectral resolution through optimized two-dimensional filter positioning.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables a compact, cost-effective spectrometer with a broad operational range covering near-infrared and infrared bands, enhanced signal restoration capability, and improved reliability with materials exhibiting plasmonic characteristics and excellent thermal stability.

Implementation Method 1

periodically arranged metal patterns, which absorb or reflect specific wavelength bands, allowing for two-dimensional integration and improved durability

Methodology Applied
Scientific EffectPlasmonic characteristics:

Implementation Method 2

unit spectral filters having stop band characteristics, composed of periodically arranged metal patterns, which absorb or reflect specific wavelength bands

Methodology Applied
Scientific EffectLight absorption: Absorption (EM radiation)

Implementation Method 3

unit spectral filters having stop band characteristics, composed of periodically arranged metal patterns, which absorb or reflect specific wavelength bands

Methodology Applied
Scientific EffectLight reflection: Reflection

Implementation Method 4

spectral filter array with unit spectral filters having stop band characteristics

Methodology Applied
Scientific EffectSpectral filtering: Filter (optical)

Implementation Method 5

unit spectral filters having stop band characteristics, composed of periodically arranged metal patterns, which absorb or reflect specific wavelength bands

Methodology Applied
Scientific EffectStop band characteristic:

Implementation Method 6

a processing unit to restore the target light spectrum from detected signals

Methodology Applied
Scientific EffectSignal restoration:

Implementation Method 7

improved reliability with materials exhibiting plasmonic characteristics and excellent thermal stability

Methodology Applied
Scientific EffectThermal stability:

Data Source

PatentUS10908019B2Spectrometer and spectrum measurement method utilizing same
Publication Date: 2021.02.02 SAMSUNG ELECTRONICS CO LTD
  • US10908019B2 patent drawing
  • US10908019B2 patent drawing
  • US10908019B2 patent drawing

AI summary

Present invention provides a spectrometer including a first unit spectral filter configured to absorb or reflect light in a part of a wavelength band of a light spectrum of an incident target, a second unit spectral filter configured to absorb or reflect light in a wavelength band different from the part of the wavelength band, a first light detector configured to detect a first light spectrum passing through the first unit spectral filter, a second light detector configured to detect a second light spectrum passing through the second unit spectral filter, and a processing unit configured to perform a function of restoring a light spectrum of the target incident from spectra of light detected from the first light detector and the second light detector.