Zero Power Plasmonic MEMS Relay for Passive Sensing

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Solution Overview

Problem

Current sensors require continuous power and cannot operate effectively in low or zero-power conditions, limiting their deployment for long-term or remote operations without battery replacement or a power source.

Innovation Solution

A zero-power plasmonic microelectromechanical system (MEMS) device that senses electromagnetic radiation and performs signal processing using the energy from detected radiation, featuring a plasmonically-enhanced MEMS relay with bimaterial legs for temperature compensation and a design allowing it to switch between ON and OFF states based on radiation presence, consuming less than 10 nW of power.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If active electronics are used in sensors, then sensing capability and signal processing are improved, but power consumption increases and continuous operation requires power source

Engineering Contradiction:
Improvesensing capabilityVSAvoidpower consumption
Core Design Contradiction:
Measurement precisionVSUse of energy by moving object

Solution Approach 1:

The patent replaces active electronic sensing systems with a passive mechanical MEMS relay system that uses electromagnetic radiation to directly actuate mechanical components. The plasmonic absorber converts incident radiation into thermal energy, which causes thermal expansion of the bimaterial legs, mechanically opening or closing the relay contacts without requiring electronic power consumption for sensing or signal processing.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The sensor system uses the energy from the detected electromagnetic radiation itself to power the switching operation. The absorbed radiation heats the bimaterial legs, which automatically actuate the relay contacts based on the radiation presence, eliminating the need for external power sources during operation.

Inventive Principle:
Principle #25Self-service

2Reliability

If continuous power is supplied to sensors, then detection reliability is improved, but operational duration without battery replacement is limited

Engineering Contradiction:
Improvedetection reliabilityVSAvoidoperational duration
Core Design Contradiction:
ReliabilityVSDuration of action of stationary object

Solution Approach 1:

The system operates in a periodic manner, remaining in a low-power standby state and activating only when electromagnetic radiation is detected. The MEMS relay switches between open and closed states based on radiation presence, allowing the sensor to maintain reliability during active detection while consuming minimal power during idle periods, thereby extending operational duration.

Inventive Principle:
Principle #19Periodic action

3Measurement precision

If thermal isolation regions are added to compensate for temperature changes, then measurement precision is improved, but device complexity increases

Engineering Contradiction:
Improvetemperature compensationVSAvoidstructure complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent utilizes thermal expansion of bimaterial legs with different coefficients of thermal expansion to achieve temperature compensation. The inner legs expand more than the outer legs when heated, causing the head to deflect in a direction that compensates for temperature-induced measurement errors. This passive thermal compensation mechanism is integrated into the relay structure without requiring additional active components.

Inventive Principle:
Principle #37Thermal expansion

Solution Approach 2:

The relay structure employs composite bimaterial legs consisting of layers with different thermal expansion coefficients. These composite materials are designed to exhibit controlled thermal response, where the differential expansion between layers creates the desired compensating deflection. The composite structure achieves temperature compensation through material selection rather than adding complex mechanical compensation mechanisms.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The device achieves high sensitivity and low false positive rates, enabling continuous monitoring and detection of various radiation sources, including vehicular exhaust, gunfire, and human presence, with the ability to identify unique targets and operate for extended periods without power replenishment.

Implementation Method 1

The inner pair of legs are attached to opposite sides of the head, while the outer pair of legs are attached to the substrate and disposed adjacent to the inner pair of legs... The bimaterial legs each comprise a stack of at least two materials having different thermal expansion coefficients.

Methodology Applied
Scientific EffectThermal expansion: Thermal Expansion

Implementation Method 2

The head includes a plasmonic absorber that absorbs electromagnetic radiation within a spectral band selected for detection of a target. The absorption of electromagnetic radiation within the spectral band causes movement of the head.

Methodology Applied
Scientific EffectPlasmonic absorption: Absorption (EM radiation)

Data Source

PatentUS11557449B2Zero power plasmonic microelectromechanical device
Publication Date: 2023.01.17 NORTHEASTERN UNIV (US)
  • US11557449B2 patent drawing
  • US11557449B2 patent drawing
  • US11557449B2 patent drawing

AI summary

A zero-power plasmonic microelectromechanical system (MEMS) device is capable of specifically sensing electromagnetic radiation and performing signal processing operations. Such devices are highly sensitive relays that consume no more than 10 nW of power, utilizing the energy in detected electromagnetic radiation to detect and discriminate a target without the need of any additional power source. The devices can continuously monitor an environment and wake up an electronic circuit upon detection of a specific trigger signature of electromagnetic radiation, such as vehicular exhaust, gunfire, an explosion, a fire, a human or animal, and a variety of sources of radiation from the ultraviolet to visible light, to infrared, to terahertz radiation.