Plasmonic Meta-Structure for Visible Light Modulation

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Solution Overview

Problem

Existing meta-structures face challenges in achieving high complex modulation efficiency, particularly at visible light wavelengths, due to limitations in active modulation and effective permittivity adjustment.

Innovation Solution

A meta-structure design comprising a lower electrode, lower and upper insulating layers, lower and upper metal oxide layers, and antenna electrodes, with specific materials and dimensions, to enhance complex light modulation efficiency through electromagnetic and magnetic field interactions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If conventional meta-structures use ITO electrodes, then they operate in near infrared region, but they cannot achieve active modulation at visible light wavelengths

Engineering Contradiction:
Improvewavelength range for active modulationVSAvoidmodulation efficiency at visible light
Core Design Contradiction:
Adaptability or versatilityVSReliability

Solution Approach 1:

The patent changes the material parameters by replacing conventional ITO electrodes with zinc oxide (ZnO) metal oxide layers, which have different optical properties that enable active modulation at visible light wavelengths instead of near infrared region

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs composite material structures including ZnO metal oxide layers combined with dielectric layers and metal layers to create a meta-structure that achieves both visible light operation and high modulation efficiency through the synergistic properties of different materials

Inventive Principle:
Principle #40Composite materials

2Adaptability or versatility

If metals and dielectrics are made sufficiently thin to adjust effective permittivity, then effective permittivity can be controlled, but the structural complexity increases

Engineering Contradiction:
Improveeffective permittivity adjustment capabilityVSAvoidlayer structure complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent divides the meta-structure into multiple thin functional layers including ZnO metal oxide layers, dielectric layers, and metal layers, where each layer has a specific thickness optimized for its function, allowing independent control of effective permittivity while maintaining manageable structural complexity

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent applies different material properties and thicknesses to different layers within the meta-structure, with ZnO layers providing plasma resonance control, dielectric layers providing insulation and field confinement, and metal layers providing additional plasma resonance tuning, allowing localized optimization of each layer's contribution to effective permittivity

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The proposed meta-structure increases complex light modulation efficiency by generating strong surface plasma polariton modes and gap surface plasmon polariton modes, allowing for efficient modulation of visible light wavelengths.

Implementation Method 1

increases complex light modulation efficiency by generating strong surface plasma polariton modes and gap surface plasmon polariton modes

Methodology Applied
Scientific EffectSurface plasma polariton:

Implementation Method 2

increases complex light modulation efficiency by generating strong surface plasma polariton modes and gap surface plasmon polariton modes

Methodology Applied
Scientific EffectGap surface plasmon polariton:

Implementation Method 3

an epsilon near zero (ENZ) frequency at which effective permittivity becomes zero may be adjusted by stacking metals and dielectrics

Methodology Applied
Scientific EffectEpsilon near zero (ENZ) frequency:

Implementation Method 4

When the metals and ITO follow a Drude model, an effective refractive index may reduce

Methodology Applied
Scientific EffectDrude model:

Data Source

PatentUS12374802B2Meta-structure
Publication Date: 2025.07.29 ELECTRONICS & TELECOMM RES INST
  • US12374802B2 patent drawing
  • US12374802B2 patent drawing
  • US12374802B2 patent drawing

AI summary

Disclosed is a meta-structure. The meta-structure includes a lower electrode, a lower insulating layer on the lower electrode, a lower metal oxide layer on the lower insulating layer, a metal layer on the lower metal oxide layer, an upper metal oxide layer on the metal layer, an upper insulating layer on the upper metal oxide layer, and antenna electrodes on the upper insulating layer.