Plasmonic Microhole Arrays for SPR Sensor Resolution

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Solution Overview

Problem

Current surface plasmon resonance (SPR) sensors face limitations in resolution and sensitivity, particularly at the micrometer scale, with optical properties of SPR-active metals like gold or silver not well characterized, and thin film SPR nearing theoretical limits.

Innovation Solution

A plasmonic structure is fabricated using an optically clear substrate coated with a monolayer of microspheres forming a sphere mask, etched to produce an array of microholes, with an adsorption layer and metallic film deposited on the substrate, resulting in a high sensitivity SPR sensor with improved refractive index detection capabilities.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional thin film SPR is used, then the sensitivity reaches theoretical limits, but the resolution remains limited to 10^-7 RIU range

Engineering Contradiction:
ImproveresolutionVSAvoidsensitivity limit
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The patent segments the continuous metallic film into an array of discrete microstructures (nanopillars, nanoholes, or triangles) with periodic spacing. This segmentation creates localized surface plasmon resonances that produce sharper spectral features, improving resolution from 10^-7 RIU to potentially 10^-8 RIU or better, while maintaining the sensitivity of conventional SPR.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent introduces structural variations at the local level by using different geometries (nanopillars, nanoholes, triangles), sizes, and spacing within the metallic film array. These local structural qualities create distinct plasmonic responses that enhance both resolution and sensitivity, allowing differentiation of subtle refractive index changes.

Inventive Principle:
Principle #3Local quality

2Measurement precision

If SPR sensors are used for label-free detection, then detection limit reaches nM or pM range, but the optical properties at micrometer scale are not well characterized

Engineering Contradiction:
Improvedetection limitVSAvoidoptical property characterization
Core Design Contradiction:
Measurement precisionVSDifficulty of detecting and measuring

Solution Approach 1:

The patent systematically varies key parameters including metallic film thickness (10-100 nm), microstructure size (50-500 nm), spacing (100-1000 nm), and geometry type to optimize and characterize optical properties at the micrometer scale. This parametric study establishes design rules for achieving detection limits in the pM range while understanding the underlying optical behavior.

Inventive Principle:
Principle #35Parameter changes

3Measurement precision

If conventional SPR sensors are used, then they achieve detectable refractive index changes, but they suffer from temperature drift effects

Engineering Contradiction:
Improverefractive index detectionVSAvoidtemperature drift
Core Design Contradiction:
Measurement precisionVSTemperature

Solution Approach 1:

The patent employs asymmetric unit cell designs where the metallic microstructures are arranged with different spacing or geometries in different regions of the sensor array. This asymmetry creates differential responses to temperature changes versus analyte binding, allowing temperature drift to be compensated or subtracted from the measurement, thereby maintaining detection precision under varying thermal conditions.

Inventive Principle:
Principle #4Asymmetry

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The structure achieves enhanced sensitivity and resolution, with a short penetration depth and narrow peak bandwidth, suitable for highly sensitive biosensing, outperforming conventional SPR sensors in detecting binding events and reducing temperature drift effects.

Implementation Method 1

surface plasmon resonance (SPR) sensors

Methodology Applied
Scientific EffectSurface plasmon resonance: Resonance

Implementation Method 2

localized surface plasmon resonance (LSPR)

Methodology Applied
Scientific EffectLocalized surface plasmon resonance: Resonance

Implementation Method 3

an adsorption layer and metallic film deposited on the substrate

Methodology Applied
Scientific EffectAdsorption: Adsorption

Data Source

PatentUS8860943B2High sensitivity plasmonic structures for use in surface plasmon resonance sensors and method of fabrication thereof
Publication Date: 2014.10.14 VALORISATION RECHERCHE LIMITED PARTNERSHIP
  • US8860943B2 patent drawing
  • US8860943B2 patent drawing
  • US8860943B2 patent drawing

AI summary

There is disclosed a method for fabricating a plasmonic structure for use in a surface plasmon resonance sensor, comprising: coating a surface of an optically clear substrate with a monolayer of microspheres forming a sphere mask; etching the sphere mask to produce an array of microholes; depositing an adsorption layer on the etched sphere mask and the surface of the optically clear substrate; depositing a metallic film on the adsorption layer; and removing the sphere mask. This is also disclosed a plasmonic structure for use in a surface plasmon resonance sensor, comprising: an adsorption layer; and a metallic film deposited on the adsorption layer; wherein the adsorption layer and the metallic film comprises an array of microholes.