Semiconductor Plasmonic Phase Modulator for High Bandwidth

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Solution Overview

Problem

Conventional photonic components, particularly modulators based on surface plasmons, struggle to achieve sufficient modulation bandwidths for high data rate applications, such as data rates above 10 GHz, due to their larger size and limited modulation capabilities.

Innovation Solution

A semiconductor-based plasmonic phase modulator that modulates the density of surface charge at the interface between a semiconductor and an insulator, using a controllable electric field to vary the surface charge density and thus modulate the phase of surface plasmons, enabling sub-wavelength-scale data links in photonic integrated circuits.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If conventional photonic components are used to achieve high bandwidth, then data transmission capability is improved, but component size increases

Engineering Contradiction:
Improvedata transmission bandwidthVSAvoidcomponent size
Core Design Contradiction:
ProductivityVSArea of stationary object

Solution Approach 1:

The patent changes the fundamental operating parameters by transitioning from conventional photonic components to surface plasmon-based modulators, enabling sub-wavelength confinement of electromagnetic energy. This parameter change allows achieving high bandwidth (>10 GHz) with dramatically reduced component dimensions, resolving the contradiction between bandwidth and size

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The invention utilizes surface plasmons that confine electromagnetic energy to two-dimensional surfaces rather than three-dimensional volumes, enabling sub-wavelength scaling. This dimensional transition from bulk photonic modes to surface-confined plasmonic modes achieves high bandwidth operation in compact footprints

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Area of stationary object

If conventional plasmonic modulators are used to reduce size, then component dimensions are decreased, but modulation bandwidth is insufficient

Engineering Contradiction:
Improvecomponent sizeVSAvoidmodulation bandwidth
Core Design Contradiction:
Area of stationary objectVSProductivity

Solution Approach 1:

The patent fundamentally changes the modulation mechanism from thermal effects (slow) to direct electrical control of surface charge density (fast). By applying voltage to control the density of surface charge at the semiconductor-insulator interface, the system achieves modulation bandwidths exceeding 10 GHz while maintaining compact dimensions

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The invention replaces thermal modulation mechanisms with direct electrical field control. Instead of using heat to change material properties (thermo-optic effects), the patent uses electric fields to directly modulate surface charge density, eliminating thermal time constants and achieving high-speed operation

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Ease of operation

If surface charge density is increased to improve modulation depth, then phase modulation capability is enhanced, but device complexity increases

Engineering Contradiction:
Improvephase modulation capabilityVSAvoiddevice structure complexity
Core Design Contradiction:
Ease of operationVSDevice complexity

Solution Approach 1:

The patent makes the semiconductor-insulator interface serve multiple functions: it provides the plasmonic channel for surface plasmon propagation, supports the surface charge that enables phase modulation, and acts as the modulation region itself. This multi-functionality eliminates the need for separate modulation structures, reducing device complexity while enhancing modulation capability

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The invention merges the plasmonic waveguide structure with the modulation region by using the semiconductor-insulator interface for both purposes. The surface charge that confines the plasmon is also the same charge that is modulated to control phase, combining guiding and modulation functions into a single integrated structure

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution allows for high data rate modulation with sub-wavelength dimensions, facilitating the realization of efficient and compact photonic and plasmonic integrated circuits capable of supporting data rates exceeding 10 GHz, while maintaining compact size.

Implementation Method 1

A surface plasmon at a given frequency generally has a wavelength that is considerably smaller than a wavelength of an optical signal in free space or a dielectric waveguide at the same frequency

Methodology Applied
Scientific EffectSurface plasmon:

Implementation Method 2

The plasmonic phase modulator varies or modulates a density of the surface charge about a bias point of the surface charge that forms and maintains the plasmonic channel. The modulation of the surface charge density about the bias point, in turn, modulates a phase of a surface plasmon propagating in the plasmonic channel

Methodology Applied
Scientific EffectElectro-optic effect: Electro-Optic Effects

Data Source

PatentUS8755648B1Semiconductor-based plasmonic phase modulator and method
Publication Date: 2014.06.17 HRL LAB
  • US8755648B1 patent drawing
  • US8755648B1 patent drawing
  • US8755648B1 patent drawing

AI summary

A plasmonic phase modulator and a method of phase modulation employ modulation of surface plasmons. The plasmonic phase modulator includes a semiconductor substrate configured to provide a surface charge that forms a plasmonic channel at the substrate surface. The modulator further includes an electrode and an insulator between the electrode and the semiconductor substrate. The electrode is configured to provide an electric field that influences the surface charge. The electric field includes a bias field component and a modulation field component. The surface plasmon is supported within the plasmonic channel at an interface between the semiconductor substrate surface and the insulator. A phase of the surface plasmon in the plasmonic channel is modulated by changes in the electric field. The method includes propagating the surface plasmon in the plasmonic channel and varying the modulation field component to modulate the phase of the propagating surface plasmon.