Surface Plasmon-Semiconductor Heterojunction for Low Interface Loss

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Solution Overview

Problem

Conventional semiconductor optoelectronic devices face limitations in quantum efficiency, response wavelengths, and industrialization due to band gap restrictions and high interface losses from heterogeneous integration processes, which are complex, costly, and difficult to scale for mass production.

Innovation Solution

A surface plasmon-semiconductor heterojunction resonant optoelectronic device is developed using a specific metal crystal face chemically bound to semiconductor seed crystals, allowing for controllable density, length-to-diameter ratio, and orientation, enabling direct and efficient coupling of surface plasmon and optical modes through a plasmonic nanostructure, surface ligand molecule, and one-dimensional semiconductor nanostructure.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional heterogeneous integration methods (soldering, binding, assembly) are used to integrate semiconductor and plasmonic structures, then device assembly is achieved, but the process complexity increases, cost increases, and interface loss increases

Engineering Contradiction:
Improveinterface qualityVSAvoidfabrication process complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent merges the semiconductor crystal growth process with the plasmonic structure formation into a single integrated process. The semiconductor nanowires are grown directly on the plasmonic nanostructures through vapor-phase deposition, eliminating the need for separate assembly steps such as soldering, binding, or mechanical assembly. This integration reduces fabrication complexity while maintaining reliable interfaces.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent replaces mechanical assembly methods (soldering, binding, assembly) with a chemical vapor deposition process. Instead of physically joining pre-fabricated components, the semiconductor material is deposited and crystallized in-situ on the plasmonic structures, substituting mechanical integration with a chemical-growth-based integration approach that reduces interface defects and process complexity.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Reliability

If conventional assembly methods are used for heterogeneous integration, then device fabrication is completed, but the production cycle becomes long and mass production becomes difficult

Engineering Contradiction:
Improvedevice stabilityVSAvoidmass production capability
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The semiconductor nanowires self-assemble and self-align on the plasmonic nanostructures through controlled vapor-phase deposition. The process utilizes self-organization of crystalline structures during growth, eliminating the need for precise manual or machine alignment steps. This self-service mechanism enables scalable production while maintaining stable, reliable interfaces.

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The plasmonic nanostructures are pre-fabricated with controlled geometry and material composition before the semiconductor deposition step. This preliminary preparation of the substrate structure enables subsequent rapid, scalable semiconductor growth without requiring complex in-situ adjustments during the main fabrication process, thereby improving productivity.

Inventive Principle:
Principle #10Preliminary action

3Quantity of substance

If conventional heterogeneous integration is used, then device assembly is achieved, but interface loss increases due to crystal face mismatch between different materials

Engineering Contradiction:
Improvematerial integrationVSAvoidinterface loss
Core Design Contradiction:
Quantity of substanceVSReliability

Solution Approach 1:

The patent controls the crystallographic orientation and phase of the semiconductor material during vapor-phase deposition by adjusting deposition parameters such as temperature, pressure, and precursor composition. By optimizing these parameters, the semiconductor crystals grow with favorable orientation relative to the plasmonic substrate, minimizing crystal face mismatch and reducing interface loss while achieving complete material integration.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances quantum efficiency, reduces interface losses, and facilitates mass production of high-performance optoelectronic devices with adjustable response spectra and low costs, overcoming the limitations of conventional methods by achieving direct coupling of localized surface plasmon resonance and optical modes.

Implementation Method 1

a specific metal crystal face is chemically bound

Methodology Applied
Scientific EffectChemical bonding: Chemical Bonding

Implementation Method 2

The surface plasmon has a significant near-field local enhancement characteristic, and can be used as a 'nano antenna' to greatly improve local light intensity density

Methodology Applied
Scientific EffectSurface plasmon resonance: Resonance

Implementation Method 3

a semiconductor structure with the controllable density, length-to-diameter ratio and orientation is strictly achieved by combining semiconductor seed crystals and continuous growth thereof

Methodology Applied
Scientific EffectEpitaxy: Epitaxy

Data Source

PatentUS10964830B2Surface plasmon-semiconductor heterojunction resonant optoelectronic device and preparation method therefor
Publication Date: 2021.03.30 SOUTHEAST UNIV
  • US10964830B2 patent drawing
  • US10964830B2 patent drawing

AI summary

A surface plasmon-semiconductor heterojunction resonant optoelectronic device and a preparation method thereof are provided. A surface ligand molecule is modified on a plasmonic nanostructure, a plasmonic crystal face structure is bound to the surface ligand molecule, a semiconductor nanostructure seed crystal is located on the plasmonic crystal face structure, a one-dimensional semiconductor nanostructure is located on the semiconductor nanostructure seed crystal, and all parts are in tight contact. The heterogeneous integration material achieves a lattice match at an interface, greatly reduces a loss caused by defects and rough crystal faces, and can achieve direct coupling of a surface plasmon mode and an optical mode. The heterogeneous integration material has a large application prospect in the fields of a nanolaser, a nano heat source and photoelectric detection and photocatalysis.