Plasmonic Via Light Interconnection for High-Speed IC Communication

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Solution Overview

Problem

Semiconductor integrated circuits face limitations in communication speed due to electrical resistance and interference from external electronic waves, making it difficult to increase data transmission efficiency between ICs.

Innovation Solution

A light interconnection device utilizing a plasmonic via structure, comprising metal-insulator-metal waveguides and plasmonic antennas with adjustable slots and nanostructures, to efficiently transmit light and overcome electrical communication constraints.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If electrical communication is used to transmit data between semiconductor ICs, then data transmission is achieved through electrical signals, but electrical resistance and interference from external electronic waves limit communication speed

Engineering Contradiction:
Improvecommunication speedVSAvoidsignal transmission reliability
Core Design Contradiction:
SpeedVSReliability

Solution Approach 1:

The patent replaces electrical signal transmission with optical signal transmission. Specifically, electrical signals are converted to optical signals through light-emitting structures (such as LEDs or lasers) that couple light into optical waveguides. This substitution eliminates electrical resistance and electromagnetic interference, enabling higher communication speeds and better signal reliability between semiconductor ICs.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the fundamental parameter of signal transmission from electrical domain to optical domain. By using optical waves instead of electrical currents, the system achieves higher bandwidth and immunity to electrical interference. The waveguide structure parameters (dimensions, materials, refractive indices) are optimized to guide optical signals effectively through the semiconductor package.

Inventive Principle:
Principle #35Parameter changes

2Speed

If optical interconnection is implemented to increase communication speed, then interference from external electronic waves is eliminated, but device structure complexity increases

Engineering Contradiction:
Improvecommunication speedVSAvoiddevice structure complexity
Core Design Contradiction:
SpeedVSDevice complexity

Solution Approach 1:

The patent merges the electrical interconnection structure with optical interconnection structure. The same conductive traces, vias, and interlayer connections that carry electrical signals are designed to also guide optical signals. This is achieved by selecting materials and geometries that support both electrical conductivity and optical waveguiding, thereby eliminating the need for separate optical components and reducing overall device complexity.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent creates multi-functional structures that serve both electrical and optical purposes. For example, metal layers are designed with thickness and geometry that provide electrical connectivity while also acting as optical waveguides or reflectors. This universal design allows a single structure to perform multiple functions, reducing the number of components needed and simplifying the overall device architecture.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Productivity

If 3D optical via structure is used to increase integration efficiency, then light transmission in desired direction is achieved, but manufacturing precision requirements increase

Engineering Contradiction:
Improveintegration efficiencyVSAvoidvia structure precision
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The patent transitions from 2D planar light transmission to 3D vertical light transmission through the use of optical vias. These vias are vertical channels that guide light from one layer to another in the z-direction, enabling three-dimensional integration. The via structures are formed with precise dimensions and alignments to ensure efficient light coupling between layers while maintaining manufacturability through standard semiconductor fabrication processes.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables high-speed, interference-free communication by converting electrical signals to optical signals, enhancing data transmission efficiency and integration density in semiconductor ICs.

Implementation Method 1

a first plasmonic antenna that includes a first slot penetrating through the second metal layer

Methodology Applied
Scientific EffectSurface plasmon resonance: Resonance

Data Source

PatentUS9715063B2Light interconnection device using plasmonic via
Publication Date: 2017.07.25 SAMSUNG ELECTRONICS CO LTD
  • US9715063B2 patent drawing
  • US9715063B2 patent drawing
  • US9715063B2 patent drawing

AI summary

A light interconnection device includes a metal-insulator-metal (MIM) waveguide including first and second metal layers and a dielectric layer provided between the first and second metal layers, and a plasmonic antenna including a slot penetrating through the second metal layer.