Flexible Plate Chuck Separation for Cured Layer Release
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Solution Overview
Problem
Existing planarization and imprint systems face challenges in separating a plate from a cured layer without causing damage, particularly when the plate is held by a flexible portion of a chuck assembly.
Innovation Solution
A method involving the use of a plate chuck assembly with a flexible portion and a central opening, where a separation front is initiated at an initial point and propagated circumferentially by tilting and applying a force to separate the plate from the cured layer, utilizing a cavity formed by the flexible portion to hold the plate and a substrate chuck.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the plate is held by a flexible portion of the plate chuck assembly during separation, then the plate can be securely held and manipulated, but it becomes difficult to separate the plate from the cured layer without causing damage
Solution Approach 1:
The separation process is divided into distinct phases: initial separation at a predetermined location, followed by controlled propagation of the separation front around the perimeter. This segmentation allows the flexible portion to hold the plate securely while the separation progresses in a controlled manner, preventing damage to the cured layer.
Solution Approach 2:
A separation front is initiated at a predetermined location on the plate before the separation process begins. This preliminary action creates a starting point for separation, allowing the flexible portion to maintain secure holding while the separation front propagates in a controlled manner, preventing sudden movements that could damage the cured layer.
2Ease of operation
If force is applied to separate the plate from the cured layer, then separation can be achieved, but the cured layer may be damaged
Solution Approach 1:
Force application is localized to specific regions rather than applied uniformly across the entire plate. The separation front propagates around the perimeter in a controlled sequence, with force applied locally at the separation front while the flexible portion maintains secure holding at other locations. This local quality approach enables effective separation while preserving the integrity of the cured layer.
Solution Approach 2:
The separation process is made dynamic through controlled propagation of the separation front around the perimeter. The flexible portion of the plate chuck assembly dynamically adjusts to maintain secure holding while allowing controlled movement at the separation front. This dynamic approach enables force application to achieve separation without damaging the cured layer.
3Reliability
If the plate chuck assembly uses a flexible portion to hold the plate, then the plate can be securely held, but the separation process becomes more difficult
Solution Approach 1:
The flexible portion of the plate chuck assembly serves dual functions: it securely holds the plate during the process and simultaneously facilitates separation by allowing controlled deformation at the separation front. This self-service capability reduces the need for additional complex mechanisms while maintaining secure holding and enabling separation.
Solution Approach 2:
The physical state of the plate chuck assembly is dynamically changed during the separation process. The flexible portion transitions from a rigid holding state to a more compliant state that allows controlled deformation as the separation front propagates. This parameter change enables the flexible portion to maintain secure holding while facilitating the separation process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables safe and efficient separation of the plate from the cured layer without causing damage, maintaining the integrity of the cured layer during the separation process.
Implementation Method 1
The plate is held by the flexible portion by reducing pressure in the cavity
Implementation Method 2
curing the film of the formable material to form a cured layer between the plate and the substrate
Data Source
AI summary
A method of shaping a surface comprises dispensing formable material onto a substrate held by a substrate chuck, contacting a plate held by a plate chuck assembly with the formable material to form a film, curing the film to form a cured layer, initiating a separation front between the cured layer and the plate, tilting the plate chuck assembly and/or the substrate chuck in a direction away from the initial separation point, thereby propagating the separation front, applying a force to the plate chuck assembly and/or the substrate chuck away from the other while maintaining or increasing the tilt, until the separation front completely propagates around the cured layer, and continuing to apply the force, until the plate does not contact the cured layer. The plate chuck assembly includes a flexible portion with a central opening, and a cavity formed by the flexible portion. The plate is held by the flexible portion.