Plate Chuck Separation Tilt for Damage-Free Cured Layer Release

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Solution Overview

Problem

Existing planarization and imprint systems face difficulties in separating a plate from a cured layer without damaging the cured layer, particularly when the plate is held by a flexible portion of a plate chuck assembly.

Innovation Solution

A method involving dispensing formable material onto a substrate, contacting a plate held by a plate chuck assembly with the formable material, curing the film to form a cured layer, initiating a separation front, tilting the plate chuck assembly, and applying a force to separate the plate from the cured layer while maintaining or increasing the tilt until the separation is complete.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the plate is held by a flexible portion of the plate chuck assembly during separation, then the plate can be securely held and positioned, but it becomes difficult to separate the plate from the cured layer without causing damage

Engineering Contradiction:

Improveplate holding stabilityVSAvoidcured layer damage during separation

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

A separation initiator creates an initial separation point between the plate and cured layer before the main separation process. This preliminary action starts a separation front that propagates across the interface, reducing the adhesion strength and enabling damage-free separation while the plate remains held by the flexible chuck portion.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The separation process is divided into distinct phases: creating an initial separation point, propagating a separation front circumferentially, and completing separation. This segmentation allows controlled propagation of the separation front while the flexible chuck maintains plate positioning, preventing sudden stress that could damage the cured layer.

Inventive Principle:

Principle #1Segmentation

2Device complexity

If a traditional separation method is used without tilt or force control, then the process is simple, but the separation front cannot propagate evenly and may damage the cured layer

Engineering Contradiction:

Improveseparation process simplicityVSAvoidseparation front propagation uniformity

Core Design Contradiction:

Device complexityVSManufacturing precision

Solution Approach 1:

The system dynamically adjusts the tilt angle and applied force during separation. The tilt is initiated and maintained at specific angles while force is applied in a controlled manner to propagate the separation front evenly. This dynamic control ensures uniform separation without damaging the cured layer, balancing simplicity with precision.

Inventive Principle:

Principle #15Dynamics

Solution Approach 2:

Physical parameters such as tilt angle and applied force are changed in a controlled sequence during separation. The tilt angle is adjusted to optimize separation front propagation, and force is applied gradually to ensure even separation. These parameter changes enable precise control while maintaining operational simplicity.

Inventive Principle:

Principle #35Parameter changes

3Ease of operation

If the plate is separated while held by the flexible portion without controlled tilt, then separation may occur, but the separation front does not propagate circumferentially and uniformity is lost

Engineering Contradiction:

Improveseparation operation simplicityVSAvoidseparation uniformity

Core Design Contradiction:

Ease of operationVSStability of the object's composition

Solution Approach 1:

The tilt is applied preliminarily before force application to establish the correct orientation for circumferential separation front propagation. This preliminary tilting action ensures that when force is applied, the separation propagates uniformly around the perimeter rather than in an uncontrolled manner, maintaining separation uniformity while keeping the operation simple.

Inventive Principle:

Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method allows for the successful separation of the plate from the cured layer without damaging the cured layer, improving the efficiency and reliability of the planarization and imprint processes.

Implementation Method 1

the plate is held by the flexible portion by reducing pressure in the cavity

Methodology Applied

Scientific EffectPressure differential: Pressure Gradient

Implementation Method 2

curing the film of the formable material to form a cured layer between the plate and the substrate

Methodology Applied

Scientific EffectCuring: Photopolymerisation

Data Source

PatentUS12282251B2Method of shaping a surface, shaping system, and method of manufacturing an article

Publication Date: 2025.04.22 CANON KK

AI summary

A method of shaping a surface comprises dispensing formable material onto a substrate held by a substrate chuck, contacting a plate held by a plate chuck assembly with the formable material to form a film, curing the film to form a cured layer, initiating a separation front between the cured layer and the plate, tilting the plate chuck assembly and/or the substrate chuck in a direction away from the initial separation point, thereby propagating the separation front, applying a force to the plate chuck assembly and/or the substrate chuck away from the other while maintaining or increasing the tilt, until the separation front completely propagates around the cured layer, and continuing to apply the force, until the plate does not contact the cured layer. The plate chuck assembly includes a flexible portion with a central opening, and a cavity formed by the flexible portion. The plate is held by the flexible portion.