Plate-Shaped Ion Pump for Compact Ultra-High Vacuum Systems
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Solution Overview
Problem
Conventional ultra-high vacuum devices, such as cylindrical ion pumps, face challenges in mounting due to their size and shape, which limits their application in devices like electron microscopes where space is restricted, particularly in the central-axis direction.
Innovation Solution
A plate-shaped electrode configuration with a center opening, combined with plate-shaped magnets arranged on both sides, reduces the ion pump's size in the central-axis direction while maintaining exhaust performance, allowing for more compact and efficient ultra-high vacuum creation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a conventional cylindrical ion pump is used to achieve high exhaust performance, then the exhaust performance is improved, but the device becomes long in the central-axis direction making it difficult to mount in space-constrained areas
Solution Approach 1:
The invention transitions from a conventional cylindrical ion pump design to a plate-shaped configuration, fundamentally changing the spatial orientation and dimensional characteristics. By arranging electrodes and magnets in a plate-like structure with central openings, the pump achieves high exhaust performance while minimizing the central-axis dimension, enabling mounting in space-constrained environments such as electron microscope lens barrels.
2Adaptability or versatility
If the ion pump size is reduced to fit in constrained spaces, then the mountability is improved, but the exhaust performance may deteriorate
Solution Approach 1:
The plate-shaped electrode configuration with centrally located openings optimizes the local arrangement of electromagnetic components. The electrodes and magnets are positioned to create focused electromagnetic fields in the central region, maintaining high ionization efficiency and exhaust performance despite the reduced overall size. This local optimization ensures that the critical vacuum pumping function is preserved while achieving compact dimensions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables the ion pump to be mounted in space-constrained areas, such as electron microscope lens barrels, while maintaining high exhaust performance and efficiency, allowing for improved ultra-high vacuum levels from 10^-4 Pa to 10^-8 Pa.
Implementation Method 1
a plate-shaped electrode group 120, which has a center opening and is formed by connecting a plurality of electrodes at intervals, and a pair of plate-shaped electrodes 131 and 132, and a pair of plate-shaped magnets 141 and 142, provided on both upper and lower sides of the electrode group, are arranged inside a casing of an ion pump
Implementation Method 2
the ultra-high vacuum technique has been regarded as important along with remarkable development of a nanotechnology and an ultra-precision measurement technique
Implementation Method 3
the ultra-high vacuum creating device of the present includes a non-evaporating getter pump
Data Source
Figure 1
Figure 2
Figure 3(a)~3(b)
AI summary
Provided is an ultra-high vacuum forming device containing an ion pump having a compact size in the central axis direction. The ultra-high vacuum forming device (1) is provided with at least one ion pump (100). The ion pump (100) is provided with: a casing (110) having at least one opening (111, 112); a board-shaped electrode group (120) formed by means of a central opening (120a) being formed along a predetermined central axis (C) disposed within the casing (110), and a plurality of electrodes (121) being joined with spaces therebetween; a pair of board-shaped electrodes (131, 132) having a different polarity than that of the electrode group (120) and that are disposed at positions sandwiching both sides of the electrode group (120) within the casing (110); and a pair of board-shaped magnets (141, 142) disposed at positions sandwiching both sides of the pair of board-shaped electrodes (131, 132).