Plate Handling Tray With Positioning Pins for Clean Edge Alignment
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Solution Overview
Problem
In the field of microelectronics, contaminants on substrate edges, such as metal elements, can reduce electrical performance, and existing methods for handling substrates often lead to contamination and alignment challenges during manufacturing and bonding processes.
Innovation Solution
A positioning system for a plate handling device that includes a tray with positioning elements, such as pins, and a housing for the handling device, ensuring precise alignment and minimizing contact with the plate edges, using polytetrafluoroethylene materials for easy cleaning and reduced contamination risks.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If a vacuum chuck is used to handle the plate, then the plate can be secured and moved without contact with the edge, but complex positioning and alignment are required to avoid contamination
Solution Approach 1:
The handling device is equipped with positioning means that automatically engage with corresponding features on the plate, enabling the device to self-position relative to the plate without requiring complex external positioning systems or manual alignment procedures
Solution Approach 2:
A positioning means acts as an intermediary between the handling device and the plate, providing a standardized interface that simplifies both the handling device design and the plate handling process while ensuring consistent positioning and avoiding edge contamination
2Object-affected harmful factors
If the substrate is rotated about itself to sweep the edge by liquid, then contaminant collection is improved, but very good centring is required to maintain constant collection height
Solution Approach 1:
The positioning means enables the handling device to automatically center itself relative to the plate through mechanical engagement features, eliminating the need for high-precision external centering while ensuring consistent liquid contact height during rotation for effective contaminant collection
3Reliability
If alignment of two plates is required for bonding, then proper bonding can be achieved, but the aligning process becomes complex due to handling stresses
Solution Approach 1:
The positioning means with standardized engagement features enables automatic alignment of multiple plates during handling and bonding operations, eliminating complex manual alignment procedures while maintaining consistent positioning accuracy despite handling stresses
Solution Approach 2:
The positioning means serves multiple functions including initial plate positioning, alignment during handling, and alignment during bonding operations, simplifying the overall process by using a single standardized interface throughout the workflow
Data Source
AI summary
System for positioning (DP) a plate handling device relative to a plate of a given shape, said device including a securing face (8) for being secured to a face of the plate:a tray (16) comprising a face for facing a face of the plate,a support (18) supporting the tray,pins (32) protruding from the face of the tray (16) and delimiting the external shape of the plate between them,a housing (28) in the tray (16) for mounting the handling device so that said securing face (8) of the handling device is oriented to the side of the face of the tray (16), the position of the housing (28) relative to the pins (32) ensuring positioning of the device relative to the plate.