Plating Apparatus Support Beams for Diaphragm Bubble Removal
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Solution Overview
Problem
Bubbles accumulating on the lower surface of the diaphragm in a plating apparatus reduce the current between the substrate and the anode, degrading the plating quality.
Innovation Solution
A plating apparatus with a supporting member that includes beam components with bubble guide paths to guide bubbles from the anode and substrate regions to the outside, preventing their accumulation on the diaphragm.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a diaphragm is arranged between the anode and substrate to prevent additive decomposition, then additive decomposition is reduced, but bubbles accumulate on the lower surface of the diaphragm degrading plating quality
Solution Approach 1:
The supporting member is divided into multiple beam components (first, second, third beam components) that extend in different directions. These segmented beam components create multiple bubble guide paths that direct bubbles toward different evacuation openings, effectively segmenting the bubble removal function across multiple pathways rather than relying on a single path.
Solution Approach 2:
The beam components act as intermediary structures between the diaphragm and the plating solution. They provide a physical pathway (bubble guide paths on their upper surfaces) that mediates the movement of bubbles from the region between the anode and substrate toward the evacuation openings, facilitating bubble removal without compromising the diaphragm's partitioning function.
2Device complexity
If the diaphragm is supported directly without beam components, then the structure is simpler, but bubbles cannot be guided away from the diaphragm lower surface
Solution Approach 1:
The harmful function of the supporting member (which would otherwise simply hold the diaphragm) is extracted and transformed into a useful function. The beam components are designed with bubble guide paths on their upper surfaces and evacuation openings that actively remove bubbles from the system. This extracts the bubble accumulation problem from the supporting member's basic function and converts it into a beneficial bubble removal mechanism.
Solution Approach 2:
The supporting member, which initially appears to merely support the diaphragm, is transformed into an active bubble removal system. The beam components' upper surfaces serve as bubble guide paths, and the evacuation openings provide escape routes for bubbles. This converts the potential harm of bubble accumulation into a benefit by actively guiding and removing bubbles through the supporting member's structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Prevents bubble accumulation on the diaphragm, maintaining consistent current flow and improving plating quality.
Implementation Method 1
the beam components including bubble guide paths for guiding bubbles from the regions between the anode and the substrate to an outside
Implementation Method 2
a diaphragm that partitions an inside of the plating tank into an anode region where the anode is arranged, and a cathode region where the substrate is arranged
Implementation Method 3
a plating tank in which a plating solution is retained, and an anode is arranged
Implementation Method 4
a substrate holder that is arranged above the anode, and holds a substrate serving as a cathode such that a surface to be plated of the substrate faces the anode
Data Source
AI summary
A technique capable of preventing bubbles from being accumulated on a lower surface of an electric field shield plate is provided. A plating apparatus includes: a plating tank in which a plating solution is retained, and an anode is arranged: a substrate holder that is arranged above the anode, and holds a substrate serving as a cathode such that a surface to be plated of the substrate faces the anode; a diaphragm that partitions an inside of the plating tank into an anode region where the anode is arranged, and a cathode region where the substrate is arranged; and a supporting member that is in contact with a lower surface of the diaphragm and supports the diaphragm, and includes a plurality of beam components extending over regions between the anode and the substrate along the lower surface of the diaphragm, the beam components including bubble guide paths for guiding bubbles from the regions between the anode and the substrate to an outside.