Plating Apparatus Labyrinth Seal for Particle Suppression

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Solution Overview

Problem

Conventional plating apparatuses face the issue of particles, such as dirt, generated at the bearing of the rotation mechanism invading the plating tank.

Innovation Solution

A plating apparatus equipped with a labyrinth seal member that includes an inner and outer labyrinth seal, a delivery port for supplying air, and a suction port for removing particles from the inner seal space, preventing their invasion into the plating tank.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If a conventional rotation mechanism with a bearing is used to rotate the substrate holder, then the substrate holder can be rotated smoothly, but particles generated at the bearing may invade the plating tank

Engineering Contradiction:

Improverotation smoothnessVSAvoidparticle invasion

Core Design Contradiction:

Ease of operationVSObject-affected harmful factors

Solution Approach 1:

A labyrinth seal member is introduced as an intermediary component between the bearing and the plating tank. This seal member includes multiple seal lips that create a labyrinthine path, forcing particles to traverse a complex route while air flow carries them away from the plating tank, thus mediating between the rotating bearing and the clean plating environment

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

Air flow is utilized to transport particles away from the plating tank. The air current passes through the labyrinth seal member, picking up particles generated at the bearing and carrying them away from the plating solution area, thus using pneumatic forces to eliminate the harmful particle invasion

Inventive Principle:

Principle #29Pneumatics and hydraulics

2Object-affected harmful factors

If a labyrinth seal member is added to suppress particle invasion, then particle invasion is reduced, but the device structure becomes more complex

Engineering Contradiction:

Improveparticle invasionVSAvoidseal structure

Core Design Contradiction:

Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The labyrinth seal member is designed with a nested structure where multiple seal lips are arranged concentrically around the rotation shaft. The seal lips are positioned within the annular space between the rotation shaft and the plating tank, creating a compact nested configuration that provides effective particle suppression without occupying excessive space or adding significant structural complexity

Inventive Principle:

Principle #7Nested doll (Nesting)

Solution Approach 2:

The labyrinth seal member employs thin seal lips that are flexible yet effective at blocking particles. These thin film-like structures create the labyrinthine path without requiring bulky components, thus reducing overall structural complexity while maintaining particle suppression functionality

Inventive Principle:

Principle #30Flexible shells and thin films

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Effectively suppresses the invasion of particles into the plating tank by using the labyrinth seal member to discharge and suction particles, maintaining a clean environment and preventing corrosion.

Implementation Method 1

a delivery port configured to supply air to an inner seal space formed inside in the radial direction with respect to the inner labyrinth seal

Methodology Applied

Scientific EffectPressure gradient: Pressure Gradient

Implementation Method 2

a suction port configured to suction air in an outer seal space formed outside in the radial direction with respect to the inner labyrinth seal and inside in the radial direction with respect to the outer labyrinth seal

Methodology Applied

Scientific EffectSuction: Suction

Data Source

PatentUS12180606B2Plating apparatus

Publication Date: 2024.12.31 EBARA CORP

AI summary

Provided is a technique that ensures suppressed invasion of particles generated at a bearing of a rotation mechanism into a plating tank.A plating apparatus 1000 includes a labyrinth seal member 50. The labyrinth seal member includes an inner labyrinth seal 53 arranged below a bearing 33 to seal the bearing, an outer labyrinth seal 54 arranged outside in a radial direction of the rotation shaft 32 with respect to the inner labyrinth seal, a delivery port 55 configured to supply air to an inner seal space 60 formed inside in the radial direction with respect to the inner labyrinth seal, and a suction port 56 configured to suction air in an outer seal space 65 formed outside in the radial direction with respect to the inner labyrinth seal and inside in the radial direction with respect to the outer labyrinth seal.