Plating Membrane Module with Inclined Bubble-Removal Surface
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Solution Overview
Problem
Gas bubbles generated in the anode chamber of cup type plating apparatus can lead to deterioration of plating quality due to their accumulation on the membrane surfaces.
Innovation Solution
Incorporation of a membrane module with a second membrane inclined to facilitate buoyancy-driven movement of gas bubbles to the outer edge, combined with a housing groove to temporarily collect and discharge them, along with a configuration that includes an ionically resistive element and electric field adjusting block to ensure homogeneous film thickness.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a membrane is used to partition the anode and cathode chambers, then ion separation and plating quality are improved, but gas bubbles accumulate on the membrane surface causing deterioration of plating quality
Solution Approach 1:
The second membrane is designed with an inclined portion that slopes downward from the center toward the outer edge of the anode chamber. This curved surface allows gas bubbles to slide down along the inclination toward the outer edge, preventing accumulation on the membrane surface while maintaining the membrane's ion separation function
Solution Approach 2:
The inclined portion of the second membrane extracts gas bubbles from the center region and directs them toward the outer edge, effectively removing the harmful gas accumulation from the plating area while preserving the membrane's primary function of ion separation
2Object-affected harmful factors
If the second membrane is added to facilitate gas bubble removal, then gas bubble accumulation is reduced, but device complexity increases
Solution Approach 1:
The second membrane serves multiple functions: it supports the first membrane, creates the inclined surface for gas bubble removal, and maintains the separation between anode and cathode chambers. By combining multiple functions into a single component, the structure remains relatively simple while achieving gas bubble removal
3Object-affected harmful factors
If the inclined portion is designed to facilitate gas bubble movement, then gas bubbles are effectively removed, but manufacturing complexity of the membrane increases
Solution Approach 1:
The second membrane is designed with a simple linear inclination angle rather than a complex curved surface. This parameter simplification makes the membrane easier to manufacture while still providing sufficient slope to enable gas bubble movement through gravity and buoyancy forces
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Prevents gas bubble accumulation on membrane surfaces, maintaining plating quality by effectively removing bubbles and ensuring uniform film thickness on substrates.
Implementation Method 1
the gas bubbles can be moved along the inclined portion of the second membrane using buoyancy and moved to an outer edge of the inclined portion of the second membrane
Data Source
AI summary
Provided is a technique that can suppress deterioration of plating quality of a substrate due to gas bubbles that remain entirely on a lower surface of a membrane.A plating apparatus 1000 includes a plating tank 10, a substrate holder 20, and a membrane module 40. The membrane module includes a first membrane 41 and a second membrane 42. The second membrane has an inflow port 42c for causing a plating solution in a first region R1 below the second membrane to flow into a second region R2 above the second membrane and below the first membrane, and an inclined portion 42b inclining relative to a horizontal direction and inclining so as to be positioned upward as heading from a center side of an anode chamber to an outer edge side of the anode chamber.