Electrochemical Plating Substrate Holder with Replaceable Seal Shell
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Solution Overview
Problem
Existing substrate holding apparatuses for electrochemical plating, such as clamshells, have short lifetimes due to damage from friction, leading to high replacement costs and compromised seal effectiveness, as the hydrophobic coatings wear off quickly during frequent use.
Innovation Solution
An apparatus featuring a chuck cup with a seal shell that wraps the chuck cup, providing a soft, thick seal that protects the substrate edges and chuck cup from electrolyte solution contact, with a vertical driving device for gentle substrate handling and a replaceable seal shell that extends the apparatus's lifespan.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a hydrophobic coating is applied to the clamshell to prevent electrolyte solution contact, then the seal effect is improved, but the coating material wears off quickly due to friction, reducing the lifetime
Solution Approach 1:
The invention divides the seal structure into two independent parts: the chuck cup (stiff structure) and the seal ring (flexible sealing component). The seal ring is made of a separate elastomeric material that can be replaced independently when worn, without replacing the entire chuck cup. This segmentation allows the sealing function to be maintained over extended periods by replacing only the wear-prone seal ring.
Solution Approach 2:
The invention uses composite materials with different properties: the chuck cup is made of a stiff, corrosive-resistant material (such as polyamide-imide or polytetrafluoroethylene) while the seal ring is made of a separate elastomeric material. This combination provides both structural integrity and effective sealing, with each material optimized for its specific function and replacement cycle.
2Strength
If the clamshell is made of stiff material to resist corrosion, then the structural strength is improved, but the seal effect deteriorates due to inability to conform to substrate surface
Solution Approach 1:
The seal function is segmented from the structural function. The chuck cup provides structural strength and corrosion resistance, while the separate seal ring provides the conforming sealing action. The seal ring's flexibility allows it to adapt to substrate surface variations while the chuck cup maintains its rigid, corrosion-resistant structure.
Solution Approach 2:
The seal ring is made of elastomeric material that forms a flexible sealing element. This flexible component can conform to the substrate surface and maintain effective sealing, while being protected from direct electrolyte contact by the rigid chuck cup structure. The flexibility of the seal ring compensates for surface irregularities.
3Ease of manufacture
If the seal ring is made thin to reduce material usage, then the manufacturing cost is reduced, but the lifetime deteriorates due to faster wear
Solution Approach 1:
The seal ring is designed as a thin elastomeric component that provides effective sealing. While thin, the elastomeric material's inherent durability and resistance to electrolyte corrosion allow it to maintain its sealing function for extended periods. The thin design reduces material usage and manufacturing cost while the material properties compensate for the reduced thickness.
Data Source
AI summary
An apparatus for holding a substrate (113) has a chuck cup (101), a seal shell (111), a chuck plate (102) and a vertical driving device (103). The seal shell (111) has a bottom wall (1111), an outer wall (1112) and an inner wall (1114). The inner wall (1114) forms a lip seal portion (1115). The bottom wall (1111) and the outer wall (1112) of the seal shell (111) respectively wrap the bottom surface and the outer surface of the base portion (1011) of the chuck cup (101). The lip seal portion (1115) wraps the supporting portion (1014) of the chuck cup (101) for sealing the edge of the front side of the substrate (113). The apparatus protects the edge of the front side of the substrate, the back side of the substrate and the chuck cup from contacting with the electrolyte solution.