Platinum Electrode (111) Orientation for Piezoelectric Stability
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Solution Overview
Problem
Piezoelectric elements used in liquid ejecting heads and other actuator devices face challenges in achieving stability and high piezoelectric properties, leading to suboptimal performance in terms of piezoelectric displacement and reproducibility.
Innovation Solution
A piezoelectric element with a first electrode film aligned on a (111) surface containing platinum as the main component, having a rhombohedral crystalline structure, and a piezoelectric body layer with a perovskite structure, where an iridium-containing film is formed between the electrode film and the piezoelectric layer to enhance crystalline and piezoelectric properties.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a piezoelectric element uses a conventional electrode film structure, then the manufacturing process is simpler, but the piezoelectric property and conductivity are insufficient
Solution Approach 1:
The electrode film is segmented into multiple functional layers: a lower electrode with (111) surface alignment providing crystalline template, an intermediate iridium-containing film layer providing nucleation sites, and an upper electrode layer. This segmentation allows each layer to perform its specific function optimally, achieving high piezoelectric property through controlled crystallization.
Solution Approach 2:
The lower electrode film is pre-aligned to have (111) surface orientation before the piezoelectric layer is formed. This preliminary alignment creates a templated crystalline structure that guides the subsequent formation of the piezoelectric layer, ensuring high crystalline quality and piezoelectric performance without requiring complex post-processing.
2Manufacturing precision
If the piezoelectric layer is formed without a crystalline template, then the manufacturing process is easier, but the crystalline property and piezoelectric displacement are reduced
Solution Approach 1:
The iridium-containing film acts as an intermediary layer between the lower electrode and the piezoelectric layer. This intermediary provides a crystalline template with appropriate lattice matching, facilitating the epitaxial growth of the piezoelectric layer and ensuring high crystalline quality while simplifying the overall manufacturing process.
Solution Approach 2:
The invention controls the crystalline structure parameters of the electrode film, specifically aligning the (111) surface orientation and controlling the crystal grain size and distribution. These parameter changes in the electrode film create optimal conditions for forming a highly crystalline piezoelectric layer with enhanced piezoelectric displacement.
3Loss of energy
If the electrode film has low crystalline property, then the manufacturing cost is lower, but the conductivity is reduced and voltage loss increases
Solution Approach 1:
The electrode system is segmented into multiple layers with specific functions: the lower electrode provides (111) surface alignment for crystalline template, the iridium-containing intermediate layer provides nucleation sites and improves adhesion, and the upper electrode provides electrical connection. This segmentation achieves low voltage loss through enhanced conductivity while maintaining manageable structural complexity.
Solution Approach 2:
The electrode structure uses composite material design combining different metals (platinum group metals) with complementary properties. The lower electrode uses a material with strong (111) surface alignment capability, while the iridium-containing intermediate layer provides excellent electrical conductivity and crystalline nucleation, creating a composite structure that minimizes voltage loss.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The improved crystalline structure of the electrode film and piezoelectric layer results in higher conductivity, reduced voltage loss, and enhanced piezoelectric properties, leading to better liquid ejecting characteristics in liquid ejecting heads and apparatuses.
Implementation Method 1
the first electrode film is aligned in prior on a (111) surface containing platinum as the main component and has a crystalline structure of rhombohedral system
Implementation Method 2
a piezoelectric body layer made of a crystallized dielectric material between two electrodes... the ink droplets in the pressure generation chamber are discharged from the opening of the nozzle under pressure by deforming the vibration plate with a piezoelectric element
Data Source
AI summary
A piezoelectric element comprising an electrode film and a piezoelectric layer provided above the electrode film. The electrode film is preferentially oriented with (111) surface and contains platinum as the main component. The electrode film has a rhombohedral system.