Platinum Sensor Oxygen Getter Protective Covering
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Solution Overview
Problem
Platinum-based sensors experience sensor drift due to oxygen dissolution in the platinum layer, leading to changes in stress and reduced reliability, particularly in pressure and temperature sensors.
Innovation Solution
A protective covering with one or more layers, including an oxygen getter material, is applied to the platinum component to act as an oxygen barrier, preventing changes in oxygen concentration and stress, thereby reducing sensor drift.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a platinum protective layer is used to protect against oxidation, then oxidation resistance is improved, but oxygen dissolution causes sensor drift and stress changes
Solution Approach 1:
A thin dielectric layer (such as silicon oxide or silicon nitride) is introduced as an intermediary between the platinum layer and the environment. This dielectric layer acts as a barrier that prevents oxygen from dissolving into the platinum while allowing the platinum to maintain its protective function against oxidation. The dielectric layer mediates the interaction between oxygen and platinum, eliminating the harmful oxygen dissolution effect while preserving the beneficial oxidation resistance.
Solution Approach 2:
The protective structure is transformed from a single platinum layer into a composite structure consisting of multiple layers: a substrate, a platinum layer, and a dielectric layer. This composite material approach combines the oxidation resistance of platinum with the oxygen barrier properties of the dielectric material, achieving both protective functions simultaneously without the harmful side effects of oxygen dissolution.
2Reliability
If platinum is used as a protective layer, then corrosion protection is improved, but sensor drift occurs due to oxygen dissolution
Solution Approach 1:
The dielectric layer serves as an intermediary that blocks the path of oxygen to the platinum layer, preventing oxygen dissolution that causes sensor drift. This intermediary structure allows the platinum to maintain its corrosion protection function while eliminating the source of measurement precision degradation.
Solution Approach 2:
The harmful function of oxygen dissolution is extracted and eliminated from the system by introducing the dielectric barrier. The platinum layer keeps its beneficial corrosion protection function, while the oxygen dissolution process is removed from the interaction pathway, thereby preventing sensor drift.
3Ease of manufacture
If a single platinum layer is used, then manufacturing simplicity is maintained, but stress changes occur over time
Solution Approach 1:
The structure evolves from a simple single-layer platinum design to a composite multi-layer structure incorporating a dielectric layer. This composite approach adds minimal manufacturing complexity while providing substantial improvement in stress stability, preventing the stress changes that occur in single-layer platinum structures over time.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution significantly reduces stress changes in the platinum component by a factor of over 10, enhancing the stability and reliability of platinum-based sensors by preventing oxygen dissolution and its associated effects.
Implementation Method 1
The protective covering comprises one or more layers, at least one of which is an oxygen getter material
Data Source
AI summary
The invention relates to sensors comprising a substrate, a platinum component having a first surface facing toward the substrate and a second surface facing away from the substrate, a protective covering over the platinum component, the protective covering comprising one or more layers, at least on of which is an oxygen getter material, a lower surface in physical contact with the second surface of the platinum component, and an upper surface; and a method for forming such a sensor. The protective covering with oxygen getter material protects the platinum component against oxygen dissolution therein, thereby reducing sensor drift.