Pleatable Composite Filter Media for Low Boron Contamination
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Solution Overview
Problem
High-efficiency filtration media with low boron content is needed to reduce contamination in semiconductor manufacturing, as conventional glass fibers contain high boron levels that can affect semiconductor wafer properties, and existing boron-free alternatives do not pleat well on existing glass pleating machines.
Innovation Solution
A composite filter media with a backer layer made from low boron chopped strand glass fibers, combined with a synthetic membrane layer, which is pleatable on existing glass pleating machines and exhibits low boron and organic outgassing, maintaining filtration efficiency and structural integrity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If conventional E-glass chopped strand fibers are used in the backer layer, then the composite filter media has sufficient rigidity and pleatability, but the boron content is high which contaminates semiconductor wafers
Solution Approach 1:
The patent removes boron from the glass fiber composition by using alternative glass chemistries (such as aluminosilicate or silica-based glasses) that provide equivalent mechanical properties without boron contamination, thereby extracting the harmful element while preserving structural integrity
Solution Approach 2:
The patent develops composite backer materials combining boron-free glass fibers with organic binders and potentially other inorganic additives to achieve the required rigidity and pleatability properties that conventional E-glass provided, creating a new composite system that eliminates boron while maintaining performance
2Object-affected harmful factors
If boron-free glass fibers are used in the backer layer, then boron contamination is reduced, but the pleatability and structural integrity deteriorate
Solution Approach 1:
The patent modifies the chemical composition parameters of the glass fibers (replacing boron with alternative oxides like氧化铝, calcium oxide, or magnesium oxide) and adjusts the binder content and type to achieve optimal pleatability and structural properties in boron-free composite materials
Solution Approach 2:
The patent creates composite structures combining boron-free glass fibers with specially formulated organic binders and potentially surface treatments to enhance fiber-to-fiber bonding and achieve the necessary pleatability and mechanical strength
3Object-generated harmful factors
If the amount of chopped strand glass fiber is reduced to eliminate boron, then boron outgassing is reduced, but the structural integrity and pleatability of the composite media deteriorate
Solution Approach 1:
The patent completely extracts boron from the material composition by substituting E-glass with boron-free glass chemistries, eliminating the source of boron outgassing while maintaining structural integrity through alternative material formulations
Solution Approach 2:
The patent changes the chemical composition parameters of the glass fibers and adjusts the binder system to compensate for the reduced fiber content, maintaining structural integrity and pleatability with lower boron or zero-boron formulations
Data Source
AI summary
A pleatable, high efficiency composite gas filtration media is provided. The media includes an essentially boron free chopped strand glass backer layer and media layer comprising a synthetic material. The composite media exhibits excellent pleatability, low boron out gassing, and low organic out gassing, with filtration performance comparable to existing commercial membrane composites.