Plunger Valve Switching for EUV Source Vacuum and Pressure Control
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Solution Overview
Problem
Existing fluid control systems for extreme ultraviolet (EUV) light sources struggle to efficiently manage vacuum and high-pressure conditions within hermetic interiors, leading to complexity, cost, and inefficiencies in maintaining desired pressure levels and preventing contamination.
Innovation Solution
A two-mode fluid control device with a single plunger valve that transitions between vacuum and pressure modes, utilizing a structure with three fluid ports and a plunger valve that moves between open and closed positions to maintain hermetic integrity, allowing for high or ultra-high vacuum and high pressure conditions, respectively, with controlled fluid conductance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single plunger valve is used to control both vacuum and pressure modes, then device complexity is reduced, but maintaining hermetic integrity during mode transitions becomes more difficult
Solution Approach 1:
The single plunger valve is designed to perform multiple functions: controlling vacuum mode (open position allowing pump access), pressure mode (closed position blocking pump access), and maintaining hermetic seals in both modes. This multi-functional design reduces the number of components while maintaining system reliability through careful sealing geometry.
2Productivity
If the first fluid port has a larger cross-sectional area for high vacuum conductance, then vacuum pumping efficiency is improved, but the valve size and manufacturing complexity increase
Solution Approach 1:
The valve incorporates ports with different cross-sectional areas optimized for their specific functions: the first fluid port has a larger area for high vacuum conductance and rapid pumping, while the second fluid port has a smaller area suitable for pressure mode operations. This localized optimization allows each port to be sized appropriately for its purpose without requiring the entire valve to be oversized.
3Reliability
If pressure is applied against the plunger valve from the fluid supply in pressure mode, then seal strength is improved, but the risk of valve failure under high pressure increases
Solution Approach 1:
The design converts the high pressure force, which could potentially damage the valve, into a beneficial sealing force. Pressure applied against the plunger valve from the fluid supply in pressure mode strengthens the seal between the valve and seating surface, transforming the harmful high-pressure load into a useful sealing mechanism that prevents leaks.
Data Source
AI summary
A fluid control device (100) includes a structure (120) defining a valve cavity, a first fluid port (135), a second fluid port (140), and a third fluid port (145) configured to be fluidly coupled to a hermetic interior (105) of a body; and a plunger valve (130) within the valve cavity and configured to move between first and second modes while maintaining the hermetic interior of the body. In the first mode, the plunger valve is open such that a first fluid flow path is open between the hermetic interior and the first fluid port and fluid is free to pass between the first fluid port and the hermetic interior. In the second mode, the plunger valve is closed such that the first fluid port is blocked from the hermetic interior by the plunger valve and a second fluid flow path is open between the hermetic interior and the second fluid port.