Integrated Particulate Matter Sensor with Microfluidic Circulation
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Solution Overview
Problem
Existing particulate matter sensors face challenges in compactness, efficiency, and cost-effectiveness due to complex fabrication processes and the need for separate components, which can lead to inaccuracies and increased costs.
Innovation Solution
A particulate matter sensor system is designed with integrated components on a common substrate, utilizing a fluid circulation device and microfluidic channels formed in the substrate or cover, enabling compact and cost-efficient fabrication, and incorporating size separation features to prevent larger particles from entering the sensor.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If separate components are used for particulate matter sensors, then component functionality is achieved, but device complexity and fabrication cost increase
Solution Approach 1:
The patent combines multiple separate sensor components (particulate matter sensor, fluid circulation device, channels, and cover) into a single integrated sensor system fabricated on one substrate. This merging eliminates the need for separate components and complex assembly processes, directly resolving the contradiction between achieving component functionality and reducing device complexity.
Solution Approach 2:
The substrate serves multiple functions simultaneously: it acts as the base for the particulate matter sensor, contains the fluid circulation device, forms the channels, and provides structural support. This multi-functionality approach allows all sensor components to be achieved while simplifying the overall fabrication process.
2Volume of moving object
If compact design is implemented, then space efficiency is improved, but manufacturing precision requirements increase
Solution Approach 1:
The sensor system is segmented into distinct functional regions on the substrate: the particulate matter sensor area, the fluid circulation device area, and the channel network. This segmentation allows each component to be optimized independently while maintaining overall compactness, reducing the precision requirements compared to a fully integrated monolithic design.
Solution Approach 2:
The patent utilizes the substrate surface area efficiently by arranging components in a two-dimensional layout rather than stacking them vertically. The channels are formed as planar features on the substrate surface, allowing compact design without excessive precision requirements in the vertical dimension.
3Measurement precision
If size separation features are added, then detection accuracy is improved, but device complexity increases
Solution Approach 1:
The size separation feature is positioned upstream in the fluid flow path, before the fluid reaches the particulate matter sensor. This preliminary action removes larger particles that would interfere with detection, improving measurement precision without requiring complex post-processing or additional sensing components.
Solution Approach 2:
The size separation feature acts as an intermediary element between the fluid source and the particulate matter sensor. It selectively removes unwanted larger particles while allowing smaller target particles to pass through to the sensor, improving detection accuracy without directly increasing sensor structural complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system achieves compactness, efficient assembly, and accurate particulate matter detection while preventing larger particles from clogging, thus ensuring reliable and cost-effective operation.
Implementation Method 1
a fluid circulation device disposed in the interior space between the cover and the substrate and configured to cause fluid to flow along the flow path through the microfluidic system
Implementation Method 2
sensors based on optical scattering
Implementation Method 3
sensors based light absorption of filters
Implementation Method 4
a particulate matter sensor based on thermophoretic deposition of particulate matter onto a receiving surface of the integrated sensor device
Data Source
AI summary
A particulate matter sensor system for sensing particulate matter in a fluid includes a substrate and a cover disposed on the substrate. The cover defines at least a portion of a flow path through the microfluidic system. The sensor system includes a particulate matter sensor disposed in an interior space between the cover and the substrate. The particulate matter sensor includes an integrated sensor device electrically connected to the substrate. The flow path is defined through the particulate matter sensor. The sensor system includes a fluid circulation device disposed in the interior space between the cover and the substrate and configured to cause fluid to flow along the flow path through the microfluidic system.


