Perpendicular Magnetic Recording Pole Footing Reduction
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Solution Overview
Problem
Conventional methods for fabricating perpendicular magnetic recording (PMR) transducers result in variations in pole height and non-uniform sidewalls, leading to undesirable artifacts such as footings and increased roughness, which affect the functioning of the transducers.
Innovation Solution
A method involving a metallic underlayer with a controlled removal rate is used to form a perpendicular magnetic recording pole, where the underlayer is deposited directly on an insulating layer, and an insulator surrounds the pole, with the underlayer's removal rate being less than or equal to the insulator's, to achieve a more uniform trapezoidal profile and reduce footing formation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a damascene process is used to form the PMR pole, then the pole can be formed with a mask and RIE, but the sidewalls become substantially linear instead of the desired negative angle, and footings are created
Solution Approach 1:
A metallic underlayer is deposited on the insulating layer before forming the PMR pole, serving as a preliminary structural element that enables subsequent processing steps to achieve the desired negative angle sidewalls while preventing footing formation
Solution Approach 2:
The removal rate of the metallic underlayer is controlled to be less than the insulator removal rate, changing the etching parameters to achieve uniform trapezoidal profiles and eliminate footings while maintaining ease of manufacture
2Shape
If the RIE process is performed with varying lengths to form the pole, then the pole shape can be adjusted, but the trench thickness varies resulting in height variations of the PMR pole
Solution Approach 1:
The metallic underlayer acts as an intermediary layer between the insulating layer and the PMR pole material, providing a uniform base that ensures consistent pole height while allowing shape adjustment through controlled RIE processes
Solution Approach 2:
By controlling the removal rate parameter of the metallic underlayer to be less than the insulator removal rate, the process achieves uniform trench thickness and consistent pole height while maintaining the ability to adjust pole shape
3Shape
If a mill-and-lap process is used to form the PMR pole, then the pole can be trimmed to achieve negative angle, but artifacts such as increased roughness and non-uniform sidewalls are created
Solution Approach 1:
The metallic underlayer is deposited as a preliminary structure that provides a uniform foundation, allowing subsequent trimming processes to achieve negative angle sidewalls without creating roughness or non-uniformities
Solution Approach 2:
The controlled removal rate of the metallic underlayer (less than insulator removal rate) enables precise control during trimming processes, achieving the desired negative angle while maintaining sidewall uniformity and reducing artifacts
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces variations in pole height and improves the uniformity of the sidewalls, resulting in a more efficient and reliable PMR transducer with reduced artifacts, enhancing the fabrication and performance of PMR heads.
Implementation Method 1
A metallic underlayer is deposited directly on an insulating layer
Implementation Method 2
an insulator having an insulator removal rate is formed. The insulator substantially surrounds at least the sides of the perpendicular magnetic recording pole
Data Source
AI summary
A method and system for providing a magnetic recording transducer are disclosed. The method and system include providing a metallic underlayer directly on a portion of an insulating layer. The method and system also include forming a perpendicular magnetic recording pole on the metallic underlayer. The perpendicular magnetic recording pole has a top, a bottom narrower than the top, and sides. The perpendicular magnetic recording pole has a pole removal rate. The method and system also include providing an insulator having an insulator removal rate. The insulator substantially surrounds at least the sides of the perpendicular magnetic recording pole. The metallic underlayer has a removal rate that is at least one of less than the insulator removal rate and substantially equal to the pole removal rate.