PMUT Array Receive Beamforming for Spurious Reflection Rejection

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Solution Overview

Problem

Conventional piezoelectric ultrasonic transducers face limitations in achieving high-frequency operation with minimal acoustic diffraction and efficient signal generation and sensing, particularly in applications requiring high resolution and low spurious reflection rejection.

Innovation Solution

The development of a Piezoelectric Micromachined Ultrasonic Transducer (PMUT) device with a center pinned membrane and interior support structure, optimized for high-frequency operation, which includes a substrate, edge support, and a piezoelectric layer with electrodes, allowing for efficient ultrasonic signal generation and sensing, and employing phase delayed transmission patterns for improved beamforming and signal processing.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional piezoelectric ultrasonic transducers are used, then signal generation and sensing can be achieved, but acoustic diffraction occurs and spurious reflections are generated at high frequencies

Engineering Contradiction:
Improvesignal qualityVSAvoidacoustic diffraction and spurious reflections
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The ultrasonic transducer array is divided into multiple independently controllable transducer elements that can be selectively activated. This segmentation allows for beamforming techniques to be applied, where signals from multiple elements are combined with specific phase and amplitude relationships to focus acoustic energy in desired directions while suppressing diffraction and spurious reflections.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the ultrasonic transducer array can be assigned different operational characteristics. The patent applies receive patterns that selectively activate specific subsets of transducers based on the direction and origin of incoming acoustic signals, optimizing local signal quality while minimizing harmful effects from other regions.

Inventive Principle:
Principle #3Local quality

2Measurement precision

If high-frequency operation is achieved, then resolution is improved, but acoustic diffraction increases and spurious reflections are generated

Engineering Contradiction:
ImproveresolutionVSAvoidacoustic diffraction and spurious reflections
Core Design Contradiction:
Measurement precisionVSObject-generated harmful factors

Solution Approach 1:

The system dynamically adjusts the receive patterns and beamforming parameters based on the operational requirements. By selectively activating different combinations of transducer elements and adjusting their phase relationships in real-time, the system maintains high resolution at high frequencies while dynamically suppressing acoustic diffraction and spurious reflections through adaptive signal processing.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent changes the operational parameters of the ultrasonic transducers, specifically the phase and amplitude of signals from different elements. By applying phase delays and amplitude weighting in receive beamforming, the system achieves high-frequency operation with improved resolution while minimizing acoustic diffraction and spurious reflections through parameter optimization.

Inventive Principle:
Principle #35Parameter changes

3Reliability

If receive patterns are selectively applied, then signal quality is improved, but device complexity increases due to multiple switches and control circuitry

Engineering Contradiction:
Improvesignal qualityVSAvoidcontrol circuitry and switches
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The ultrasonic transducer array is designed with multi-functionality, where the same physical transducer elements can be configured for different receive patterns through electronic control. This universal design allows a single array structure to perform multiple sensing functions without requiring separate hardware for each pattern, reducing overall device complexity while maintaining signal quality.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The system uses digital signal processing and software-based beamforming to achieve selective receive patterns, allowing the transducer array to self-configure for different operational modes. This approach replaces complex analog switching networks with programmable control logic, simplifying the hardware while maintaining the ability to selectively apply different receive patterns for optimal signal quality.

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The PMUT device achieves high-frequency operation with reduced acoustic diffraction, enabling better rejection of spurious reflections and enhanced signal quality, suitable for applications such as fingerprint sensing and other biometric systems.

Implementation Method 1

a piezoelectric layer (110) between the first and second electrodes (106, 108), wherein the piezoelectric layer (110) is configured to vibrate in response to an actuation voltage applied across the first and second electrodes (106, 108)

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

a piezoelectric layer (110) between the first and second electrodes (106, 108), wherein the piezoelectric layer (110) is configured to vibrate in response to an actuation voltage applied across the first and second electrodes (106, 108)

Methodology Applied
Scientific EffectPiezoelectric effect: Converse Piezoelectric Effect

Implementation Method 3

Piezoelectric materials are widely utilized in piezoelectric ultrasonic transducers to generate acoustic waves based on an actuation voltage applied to electrodes

Methodology Applied
Scientific EffectUltrasonic vibration: Ultrasonic Vibration

Data Source

PatentEP3455850B1Receive operation of an ultrasonic sensor
Publication Date: 2023.10.11 INVENSENSE INC
  • EP3455850B1 patent drawingFigure 1A~2
  • EP3455850B1 patent drawingFigure 3~4
  • EP3455850B1 patent drawingFigure 5~6

AI summary

An ultrasonic sensor includes a two-dimensional array of ultrasonic transducers including a plurality of sub-arrays of ultrasonic transducers, wherein a sub-array of ultrasonic transducers of the plurality of sub-arrays of ultrasonic transducers is independently controllable, and wherein a sub-array of ultrasonic transducers has an associated receive channel. A plurality of shift registers is configured to select a receive pattern of ultrasonic transducers of the two-dimensional array of ultrasonic transducers to activate during a receive operation. An array controller is configured to control selection of the ultrasonic transducers during the receive operation according to the receive pattern and configured to shift a position of the receive pattern within the plurality of shift registers such that the ultrasonic transducers activated during the receive operation moves relative to and within the two-dimensional array of ultrasonic transducers.