Pneumatic Actuator for Semiconductor Vibration Isolation
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Solution Overview
Problem
Existing pneumatic actuators are not suitable for stationary active vibration isolation systems due to limitations such as high frictional forces, transverse force components, and the need for multiple magnetic actuators, which are complicated to install and limited by heat dissipation issues in large semiconductor processing systems.
Innovation Solution
A pneumatic actuator design featuring a piston moving within a working space divided into two pressure chambers with a gap to minimize friction, guided by leaf springs to prevent tilting, and coupled to the load via extensions for transverse isolation, allowing force generation in one direction while decoupling transversely, and controlled by a control device adjusting air pressure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If magnetic actuators are used in stationary vibration isolation systems, then active vibration compensation can be achieved, but multiple actuators must be connected in parallel which complicates installation and is limited by heat dissipation
Solution Approach 1:
The patent replaces magnetic actuators with a pneumatic actuator that uses compressed air to generate compensating forces. The pneumatic actuator includes a piston moving within a working space, divided into two pressure chambers, eliminating the need for multiple magnetic actuators connected in parallel while reducing heat dissipation issues inherent in electromagnetic systems
Solution Approach 2:
The invention employs pneumatic pressure to generate the compensating force needed for vibration isolation. By using compressed air in a pneumatic actuator with a piston and pressure chambers, the system achieves active vibration compensation without the complexity and thermal limitations of magnetic actuator systems
2Force
If conventional pneumatic actuators are used, then force generation is possible, but frictional forces between cylinder and piston reduce effectiveness
Solution Approach 1:
The patent extracts the piston from direct contact with the cylinder wall by introducing a gap between them. This eliminates the frictional contact that would otherwise occur between the piston and cylinder, reducing energy loss while maintaining the force generation capability through pneumatic pressure differential
Solution Approach 2:
The invention changes the physical parameter of the piston-cylinder interface by introducing a gap, transforming the system from direct contact to non-contact operation. This parameter change eliminates frictional forces while the pneumatic pressure system maintains effective force generation
3Force
If conventional pneumatic actuators are used, then force generation is possible, but transverse force components reduce precision
Solution Approach 1:
The patent introduces leaf springs as intermediary elements that guide the piston movement and prevent transverse displacement. These leaf springs act as mediators between the pneumatic pressure system and the load, ensuring that force is transmitted precisely in the intended axial direction without transverse components
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The pneumatic actuator effectively generates forces in one direction with minimized transverse forces, suitable for stationary vibration isolation systems, and can be used in combination with other actuators to provide comprehensive vibration isolation, replacing magnetic actuators and addressing installation and heat dissipation challenges.
Implementation Method 1
The pneumatic actuator comprises a working space with a piston. The working space is divided by the piston into a first pressure chamber and a second pressure chamber, so that the piston can be subjected to a pressure from both sides, whereby a force can be generated
Implementation Method 2
In order to minimize frictional forces and vibrations caused by a movement of the piston, the piston is spaced apart from the inner surface of the working space by a gap
Implementation Method 3
the piston is guided axially by at least two leaf springs that are spaced apart from each other. The leaf springs ensure that the piston is not tilted nor displaced transversely to the direction of action
Data Source
AI summary
A pneumatic actuator configured for a stationary vibration isolation system which serves to accommodate equipment for processing semiconductor devices. The pneumatic actuator comprises a working space with a piston which divides the working space into a first and a second pressure chamber, and the piston is spaced apart from an inner surface of the working space by a gap, and the piston is movable only in an axial direction.