Pneumatic End Effector Suction for Substrate Transport Precision
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
In electronic device manufacturing, substrates often slip during transport, leading to positioning errors, increased misalignment correction time, and particle generation, which contaminates tools and system components.
Innovation Solution
An end effector apparatus with pneumatic suction elements is used, coupled to a robotic component, to provide a downward suction force that adheres the substrate to contact pads, reducing slippage and enabling faster and more precise substrate movement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If pneumatic suction elements are used to adhere the substrate to contact pads, then substrate slippage is reduced and positioning precision is improved, but device complexity increases
Solution Approach 1:
The patent applies pneumatic suction elements that utilize pneumatic pressure to adhere the substrate to the contact pads. The suction elements create a vacuum or negative pressure field that holds the substrate firmly in place during transport, eliminating slippage and improving positioning precision without requiring complex mechanical clamping mechanisms.
Solution Approach 2:
The invention replaces traditional mechanical clamping or gripping mechanisms with a pneumatic field-based holding system. This substitution eliminates the need for complex mechanical linkages, springs, and actuators while achieving more reliable substrate adhesion through controlled pneumatic pressure.
2Object-generated harmful factors
If pneumatic suction elements are used to reduce substrate slippage, then particle generation is reduced, but use of energy increases
Solution Approach 1:
The pneumatic suction elements create a controlled vacuum field that securely holds the substrate without requiring excessive force. This prevents substrate slippage and the generation of particles during transport, while the pneumatic system is designed to maintain suction with minimal energy consumption through efficient sealing and pressure control.
3Speed
If pneumatic suction elements are used to adhere the substrate, then substrate transport speed can be increased, but device complexity increases
Solution Approach 1:
The pneumatic suction elements provide rapid activation and deactivation of the holding force, enabling fast substrate pickup and release. The pneumatic system allows for quick response times compared to mechanical systems, facilitating higher transport speeds while maintaining secure substrate adhesion throughout the motion cycle.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enhances process throughput by allowing faster substrate movement between system components, reduces particle generation, and improves manufacturing yield by minimizing misalignment corrections.
Implementation Method 1
generating suction via operation of the one or more pneumatic suction elements to draw the substrate into increased contact with the at least three contact pads
Data Source
AI summary
Systems, apparatus and methods including pneumatic end effectors for transporting substrates between system components of electronic device manufacturing systems are provided. In one aspect, an end effector has a base adapted to be connected to a robotic component, and one or more pneumatic suction elements positioned on the base. Applying a pneumatic source to the pneumatic suction element draws a substrate into contact with contact pads of the end effector. Methods and systems, as well as numerous other aspects are disclosed.