Pneumatic Flexure Stabilization for Image Projection Systems
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional maskless lithography systems experience vibrations that cause image projection systems to shift, leading to mura and other undesirable effects in the mask pattern during the patterning process.
Innovation Solution
A projection stabilization system is implemented using stiffeners with pneumatic cylinders and flexures that stabilize image projection systems by applying pressure to retain them in a processing position despite vibrations, allowing flexibility in other directions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If the image projection system is rigidly fixed to the bridge, then the position stability is improved, but the system cannot compensate for vibrations during operation
Solution Approach 1:
The patent employs a dynamic stabilization mechanism where pneumatic cylinders actively adjust the position of image projection systems in real-time to compensate for vibrations. The system transitions from a static rigid connection to a dynamically adjustable connection that can respond to vibrational disturbances during operation.
Solution Approach 2:
The stabilization system incorporates feedback control through sensors that detect positional deviations of image projection systems and automatically activate pneumatic cylinders to correct these deviations. This closed-loop control enables the system to maintain position stability while adapting to vibrational conditions.
2Adaptability or versatility
If the image projection system is allowed to move freely, then the vibration compensation capability is improved, but the position stability deteriorates
Solution Approach 1:
The patent utilizes flexible connection elements and mounting structures that allow controlled movement of image projection systems while maintaining overall positional stability. These flexible components enable the system to absorb vibrational energy without compromising the fixed position requirement.
3Stability of the object's composition
If stiffeners are added to prevent vibrations, then the position stability is improved, but the device complexity increases
Solution Approach 1:
The patent employs pneumatic cylinders as the primary stabilization mechanism, utilizing gas pressure to adjust and maintain the position of image projection systems. This pneumatic approach provides effective vibration compensation without requiring complex mechanical stiffening structures, thereby limiting the increase in device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively maintains the image projection systems in a stable processing position, reducing mura and other undesirable effects by minimizing reaction forces and compensating for vibrations.
Implementation Method 1
The pneumatic cylinder is operable to engage or disengage from the flexure when the flexure is coupled to the IPS mount and the base
Implementation Method 2
a flexure coupleable to an image projection system (IPS) mount of an IPS coupled to an IPS bridge and coupleable to the base of the housing
Data Source
AI summary
Embodiments of the present disclosure relate to projection stabilization systems and maskless lithography systems having projection stabilization systems. The projection stabilization system compensates for propagating vibrations that move image projection systems (IPS's). The IPS's are in a processing position prior to operation of the maskless lithography process. One or more stiffeners are coupled to the IPS. The one or more stiffeners apply pressure to flexures coupled to each stiffener. The flexures are coupled to the IPS to provide stabilization to the IPS during the operations of the maskless lithography process. For example, the one or more of stiffeners protect the IPS from vibrations that propagate through the system during operation.