Pneumatic Actuator Isolator for Semiconductor Vibration Compensation
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing stationary vibration isolation systems for semiconductor processing face challenges in generating high compensation forces while minimizing heat dissipation, particularly due to the limitations of electrically driven magnetic actuators in large systems.
Innovation Solution
A pneumatic actuator integrated within a pneumatic spring isolator, which generates compensation forces in both vertical and horizontal directions, reducing heat dissipation and allowing for a compact design by using an annular configuration and leaf springs to minimize frictional forces.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Force
If magnetic actuators are used to generate high compensation forces, then the compensation force capability is improved, but heat dissipation increases and installation space requirements increase
Solution Approach 1:
The patent replaces magnetic actuators with a pneumatic actuator that uses compressed air to generate compensation forces. The pneumatic spring (4) and pneumatic actuator (10, 11) convert pneumatic pressure into mechanical force, eliminating the heat dissipation issues associated with electromagnetic actuators while providing sufficient compensation force for vibration isolation
2Force
If multiple magnetic actuators are connected in parallel to increase compensation force, then the compensation force capability is improved, but device complexity and installation space requirements increase
Solution Approach 1:
The patent combines the vibration isolation function and compensation force generation into a single integrated isolator unit. The pneumatic spring (4) provides passive vibration isolation while the pneumatic actuator (10, 11) integrated within the same housing generates active compensation forces, eliminating the need for separate actuators and reducing overall system complexity
3Force
If magnetic actuators are used in large vibration isolation systems, then high compensation forces can be generated, but heat dissipation and installation space problems worsen
Solution Approach 1:
The patent nests the pneumatic actuator (10, 11) within the housing of the pneumatic spring (4). The actuator operates within the existing volume of the isolator, utilizing the internal space of the pneumatic spring housing, thereby achieving high compensation forces without increasing the external dimensions or installation footprint of the isolator
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The pneumatic actuator effectively produces high compensation forces with reduced heat dissipation, enabling efficient vibration isolation in semiconductor processing systems, even in constrained spaces.
Implementation Method 1
The isolator (1) comprises a spring, in particular a pneumatic spring (4)
Implementation Method 2
a bending pendulum (4), in particular a double bending pendulum, to provide an isolating effect in horizontal direction
Implementation Method 3
the isolator (1) comprises at least one pneumatic actuator (10, 11)... the actuator is preferably not used for decoupling from the floor the load which is supported with vibration isolation, but only to generate compensation forces
Data Source
AI summary
An isolator for a stationary vibration isolation system, which is effective in the horizontal and vertical directions, the isolator comprising at least one pneumatic actuator.