Pneumatic Vibration Isolator With Restricted Gas Flow Soft Landing

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Solution Overview

Problem

Pneumatic vibration isolators are prone to membrane rupture, leading to sudden pressure drops and potential damage to payloads, especially when multiple isolators support heavy loads, as a rupture in one isolator can cause increased load on others, resulting in potential membrane rupture and payload crash.

Innovation Solution

A vibration isolator design featuring at least two pressurized gas compartments connected via a tubing system with restrictions that reduce the cross-sectional area by at least 50%, limiting gas flow and preventing sudden pressure drops, and an optional damping chamber to control pressure and prevent overshooting, ensuring a 'soft landing' for the payload.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Force

If multiple pneumatic vibration isolators are arranged next to each other to support a heavy payload, then the payload can be supported, but rupture of the membrane in one isolator causes sudden increase in load on remaining isolators leading to their rupture and payload crash

Engineering Contradiction:
Improvesupport capacityVSAvoidsystem reliability
Core Design Contradiction:
ForceVSReliability

Solution Approach 1:

The system divides the support function into multiple independent pneumatic isolators, each capable of supporting the payload individually. This segmentation ensures that if one isolator fails, the others can continue to support the payload, preventing complete system failure and payload crash.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The tubing system incorporates restrictions (narrow sections) that limit the rate of air flow between isolators. This creates a cushioning effect by preventing sudden pressure equalization when one isolator ruptures, allowing gradual load redistribution and preventing shock loads that would cause remaining isolators to fail.

Inventive Principle:
Principle #11Beforehand cushioning (Prior cushioning)

2Reliability

If the membrane of the air compartment ruptures, then air pressure drops suddenly, but this causes the payload to crash down causing shock to the payload and possibly damaging it

Engineering Contradiction:
Improvemembrane integrityVSAvoidshock to payload
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The tubing restrictions are pre-designed to limit the maximum flow rate of air between compartments. When a membrane ruptures, these restrictions act as a cushioning mechanism that prevents sudden pressure equalization, thereby preventing the payload from crashing down and avoiding shock damage.

Inventive Principle:
Principle #11Beforehand cushioning (Prior cushioning)

Solution Approach 2:

The tubing system with restrictions acts as an intermediary between the pneumatic isolators. It mediates the pressure equalization process by controlling the rate of air flow, transforming a potentially harmful sudden pressure drop into a controlled, gradual process that protects the payload.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Force

If several pneumatic vibration isolators are used to support a heavy payload, then the payload can be supported, but the complexity of the system increases

Engineering Contradiction:
Improvesupport capacityVSAvoidsystem complexity
Core Design Contradiction:
ForceVSDevice complexity

Solution Approach 1:

Multiple pneumatic isolators are merged into a single integrated system through the common tubing network with restrictions. This allows the system to function as a unified structure where the isolators work together to support the payload, while the tubing system provides coordinated pressure management across all isolators.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design effectively prevents sudden drops and damage by distributing pressure and controlling gas flow, ensuring a stable and controlled descent of the payload in case of membrane rupture, while maintaining accurate positioning and reducing pressure noise.

Implementation Method 1

at least two pressurized gas compartments arranged next to each other to support the contact member at different locations

Methodology Applied
Scientific EffectPneumatic pressure: Pressure Increase

Implementation Method 2

the tubing system contains at least one restriction at which a cross section of the tubing system is reduced by at least 50%

Methodology Applied
Scientific EffectFluid flow restriction: Flow Separation

Implementation Method 3

vibration isolator for supporting a payload and isolating the payload from vibrations

Methodology Applied
Scientific EffectVibration isolation: Vibration

Data Source

PatentUS20230279919A1Vibration isolator for supporting a payload
Publication Date: 2023.09.07 CARL ZEISS SMT GMBH
  • US20230279919A1 patent drawing
  • US20230279919A1 patent drawing

AI summary

A vibration isolator (10; 210) for supporting a payload and isolating the payload from vibrations has a contact member (12) configured for supporting the payload, at least two pressurized gas compartments (24) arranged offset from each other to support the contact member at different locations, which pressurized gas compartments are connected to each other via a tubing system (54). The tubing system contains at least one restriction (66) at which a cross section of the tubing system is reduced by at least 50%.