Pneumatic Liquid Replenishing Device for Semiconductor Cleaning

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Current semiconductor cleaning processes require accurate and periodic replenishment of chemical liquids and ultrapure water to maintain concentration stability, but existing solutions, such as electrically controlled metering pumps, are large, complex, and costly.

Innovation Solution

A liquid replenishing device comprising a liquid storage tank, chemical and ultrapure water supply pipelines, a circulating pipeline, pneumatic valves, a metering pump, and a liquid level sensor, which uses pneumatic valves and a non-electrically controlled metering pump to ensure accurate and quantitative replenishment of ultrapure water, reducing operational complexity and cost.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If an electrically controlled metering pump is used to replenish chemical liquids or ultrapure water, then accurate supplement can be achieved, but the device size becomes large and the control system becomes complicated

Engineering Contradiction:

Improveliquid volume supplement accuracyVSAvoidcontrol system complexity

Core Design Contradiction:

Measurement precisionVSDevice complexity

Solution Approach 1:

The patent replaces the electrically controlled metering pump with a pneumatic valve system driven by a PLC controller. The pneumatic valve uses compressed air to control liquid flow through the replenishing pipeline, eliminating the need for complex electrical motor control while maintaining accurate volume supplementation through pneumatic pressure regulation and timed operation cycles.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The invention introduces a pneumatic valve connected to a compressed air source to control the replenishment of chemical liquids and ultrapure water. The pneumatic system regulates liquid flow through pressure-controlled valve operation, providing a simpler alternative to electrical metering pumps while achieving the required measurement precision for liquid volume supplementation.

Inventive Principle:

Principle #29Pneumatics and hydraulics

2Measurement precision

If an electrically controlled metering pump is used to replenish chemical liquids or ultrapure water, then accurate supplement can be achieved, but the cost increases

Engineering Contradiction:

Improveliquid volume supplement accuracyVSAvoidmanufacturing cost

Core Design Contradiction:

Measurement precisionVSEase of manufacture

Solution Approach 1:

The patent adopts a pneumatic valve system that is less expensive than electrically controlled metering pumps. The pneumatic components are simpler in construction and lower in cost, while the system achieves the required accuracy through PLC-controlled pneumatic valve timing and pressure regulation, reducing the overall manufacturing cost of the liquid replenishment system.

Inventive Principle:

Principle #27Cheap short-living objects (Disposable)

Solution Approach 2:

By replacing the expensive electrical metering pump with a pneumatic valve system, the invention reduces manufacturing costs. The pneumatic system uses readily available compressed air infrastructure and simpler valve mechanisms, eliminating the need for costly electrical motors, sensors, and control electronics while maintaining functional equivalence in terms of liquid supplementation accuracy.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Adaptability or versatility

If chemical liquids are reused during cleaning processes, then the original concentration changes, but periodic replenishment increases operational complexity

Engineering Contradiction:

Improvechemical liquid concentration stabilityVSAvoidreplenishment operation complexity

Core Design Contradiction:

Adaptability or versatilityVSEase of operation

Solution Approach 1:

The patent implements a PLC-controlled system that monitors and manages the replenishment process automatically. The system tracks the usage of chemical liquids during cleaning processes and triggers periodic replenishment operations based on predetermined criteria, maintaining concentration stability without requiring manual intervention or complex operational procedures from the user.

Inventive Principle:

Principle #23Feedback

Solution Approach 2:

The pneumatic valve system automatically replenishes chemical liquids and ultrapure water based on PLC control logic that monitors system needs. The system performs self-service replenishment operations without requiring manual operation, maintaining chemical liquid concentration stability through automated periodic supplementation while keeping the user interface simple and easy to operate.

Inventive Principle:

Principle #25Self-service

Data Source

PatentUS9275880B2Liquid replenishing device

Publication Date: 2016.03.01 BEIJING SEVENSTAR ELECTRONICS CO LTD

AI summary

The present invention provides a liquid replenishing device comprising a liquid storage tank, a chemical liquid supply pipeline, an ultrapure water supply pipeline, an ultrapure water quantitative supplement pipeline and a circulating pipeline. The chemical liquid supply pipeline supplies chemical liquids to the liquid storage tank. The ultrapure water supply pipeline supplies ultrapure water to the liquid storage tank. The ultrapure water quantitative supplement pipeline quantitatively replenishes ultrapure water to the liquid storage tank. One end of the circulating pipeline is connected with the outlet of the liquid storage tank, the other end of the circulating pipeline is connected with the inlet of the liquid storage tank.