Pneumatic Microvalve Layout With Branched Pressure Control

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Solution Overview

Problem

Microfluidic devices with integrated pneumatic microvalves face challenges in scaling due to increased size and complexity from multiple pressure lines and external pressure control switches, and soft lithography-based materials struggle with surface stability and electrical connections.

Innovation Solution

A microfluidic device design with a flexible membrane and branching pressure lines allows independent control of multiple pneumatic microvalves using a single pressure line, incorporating rigid substrates and mature manufacturing techniques like CMOS processing for improved stability and electronic circuit integration.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If each pneumatic microvalve is connected to an external pressure control switch, then independent control of each valve is achieved, but the device size and infrastructure complexity increase rapidly

Engineering Contradiction:
Improveindependent control of pneumatic microvalvesVSAvoidnumber of pressure lines and inlets
Core Design Contradiction:
Ease of operationVSDevice complexity

Solution Approach 1:

The patent merges multiple pressure control functions into a single integrated pressure control switch located within the microfluidic device. This single switch controls multiple pneumatic microvalves through internal pressure distribution channels, eliminating the need for multiple external pressure control switches and reducing the number of external pressure lines and inlets required.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent implements a nested structure where the pressure control switch is integrated within the microfluidic device housing. The switch contains internal pressure distribution channels that branch out to multiple pneumatic microvalves, creating a hierarchical pressure control system where one control element manages multiple valves through nested pressure pathways.

Inventive Principle:
Principle #7Nested doll (Nesting)

2Ease of manufacture

If soft lithography and elastomeric materials are used for fabrication, then rapid prototyping and ease of fabrication are achieved, but surface stability and adhesion of other materials deteriorate over time

Engineering Contradiction:
Improverapid prototyping and ease of fabricationVSAvoidsurface stability over time
Core Design Contradiction:
Ease of manufactureVSStability of the object's composition

Solution Approach 1:

The patent changes the material parameter from traditional elastomeric materials to rigid materials such as glass or semiconductor substrates. This parameter change improves surface stability and adhesion properties while still allowing for fabrication using adapted lithography techniques, thus resolving the contradiction between ease of manufacture and long-term stability.

Inventive Principle:
Principle #35Parameter changes

3Ease of operation

If elastomeric materials are used for pneumatic microvalves, then flexible membrane bending is achieved, but electrical connection formation and circuit integration become difficult

Engineering Contradiction:
Improvemembrane flexibility for valve controlVSAvoidelectrical connections and circuits integration
Core Design Contradiction:
Ease of operationVSDevice complexity

Solution Approach 1:

The patent introduces an intermediary rigid substrate structure that facilitates electrical connections. The rigid substrate serves as a stable platform for forming electrical traces and connections, while the flexible membrane is integrated as a separate layer that provides the bending action for valve control, thus mediating between the need for flexibility and electrical integration.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design reduces the number of pressure inlets and outlets, enables efficient and reliable independent control of pneumatic microvalves with minimal actuation force, and facilitates the integration of complex electronic circuits for precise control.

Implementation Method 1

a pressure in the first pressure channel portion can bend the flexible membrane into the fluidic channel portion and/or out of the first pressure channel portion, thereby closing the fluidic channel portion

Methodology Applied
Scientific EffectElastic deformation: Elasticity

Implementation Method 2

an actuator for bending the flexible membrane into the second pressure channel portion and/or out of the cavity, thereby closing the second pressure channel portion

Methodology Applied
Scientific EffectMechanical actuation: Mechanical Force

Data Source

PatentUS11313489B2Microfluidic device for controlling pneumatic microvalves
Publication Date: 2022.04.26 INTERUNIVERSITAIR MICRO ELECTRONICS CENT (IMEC VZW)
  • US11313489B2 patent drawing
  • US11313489B2 patent drawing

AI summary

Example embodiments relate to microfluidic devices for controlling pneumatic microvalves. One embodiment includes a microfluidic device for independently controlling a plurality of pneumatic microvalves. The microfluidic device is couplable to a pressure source. The microfluidic device includes a first substrate. The microfluidic device also includes a flexible membrane covering the first substrate. Additionally, the microfluidic device includes a second substrate covering the flexible membrane. Further, the microfluidic device includes one or more fluidic channels at least partially defined in the first substrate. In addition, the microfluidic device includes a pressure couplable to the pressure source and branching into a plurality of pressure channels. Still further, the microfluidic device includes at least one pressure control switch per pressure channel.