Pneumatic Positioning Control Using Pressure Learning Feedback
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Solution Overview
Problem
Existing pneumatic positioning devices and vacuum valves in vacuum applications face challenges such as inaccurate positioning due to technological deviations and nonlinear dynamics influenced by ambient and operating conditions, leading to potential substrate breakage and processing inefficiencies.
Innovation Solution
A data-driven model is employed to estimate the position of lift pins and vacuum valve closures using a training algorithm, considering operating parameters like voltage, pressure, and temperature, allowing for continuous recalibration to account for device-to-device variations and environmental changes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If physics and parameter-based driving approaches are used for pneumatic positioning devices, then the control system is simple, but positioning accuracy deteriorates due to technological deviations and nonlinear dynamics
Solution Approach 1:
The patent implements feedback by using measured pressure signals from the pneumatic actuator to continuously update the drive behavior through a learning algorithm. The system measures actual pressure during operation, compares it with expected pressure for desired position, and adjusts subsequent drive commands to compensate for deviations, thereby improving positioning accuracy without significantly increasing system complexity.
Solution Approach 2:
The system performs self-calibration and self-adjustment through automated learning cycles. The learning algorithm automatically processes measured pressure data and updating drive behavior without manual intervention, allowing the system to adapt to its specific characteristics and environmental conditions over time, improving accuracy while maintaining simple operation.
2Manufacturing precision
If repeated learning cycles are performed to account for changes over time, then positioning accuracy is maintained, but loss of time occurs during recalibration
Solution Approach 1:
The learning process is designed to be continuous or periodically interspersed with normal operation rather than requiring complete system shutdown. Pressure measurements are taken during normal operation, and learning cycles can be performed during idle periods or transitions, minimizing interruption to productive activity while maintaining accuracy.
Solution Approach 2:
The system performs learning and adaptation in advance during idle periods or between production cycles, so that when production resumes, the system is already optimized for current conditions. This preliminary calibration minimizes time loss during actual production operations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances the accuracy and reliability of pneumatic positioning devices and vacuum valves by reducing undesirable effects of technological differences, ensuring precise and homogeneous movement, and minimizing substrate damage.
Implementation Method 1
a first pneumatic actuator (11) connected to the first mount (17) and interacting with the first mount (17) in such a way that the first mount (17) is movable along a first movement axis (M1)
Implementation Method 2
a first control valve (21) connected to the first pneumatic actuator (11) and to a first fluid supply (35) and configured to vary at least one of the pressure in the first pneumatic actuator (11) and the fluid flow out of or into the first pneumatic actuator (11)
Data Source
AI summary
A vacuum system comprises at least a pneumatic positioning device comprising a mount configured to hold an effecting element and a pneumatic actuator connected to the mount. A control valve is connected to the pneumatic actuator and to a fluid supply. A fluid sensor measures the pressure of the pneumatic actuator. A method includes applying a controlling signal to the control valve to vary the pressure of the pneumatic actuator and move the mount from a starting position to an end position, monitoring the pressure of the pneumatic actuator by the fluid sensor, determining when the mount arrives at the end position, and deriving the controlling parameters based on processing a set of observed parameters, wherein the set of observed parameters comprises at least the controlling signal, the varying pressure, and arrival information of the mount at the end position.