Pneumatic Push-Up Unit for Die Separation from Dicing Tape

The patent replaces the solid push-up unit with a pneumatic push-up unit that uses compressed gas to inflate an elastic body (such as a balloon or rubber membrane). This pneumatic system allows the die to be pushed up from below through uniform expansion of the elastic body, eliminating the concentrated constrained forces that caused damage with solid push-up units while maintaining effective separation capability

The patent changes the physical state and pressure parameters of the push-up mechanism. By controlling the inflation pressure of the elastic body, the system can adjust the pushing force dynamically. The elastic body expands gradually under controlled pressure, providing a soft, uniform pushing action that prevents die damage while ensuring complete separation from the dicing tape

The pneumatic push-up unit provides uniform, distributed pressure through the inflated elastic body, which gently lifts thin dies without creating stress concentration points. This pneumatic lifting mechanism handles thin dies (10 μm or less) with forces distributed across the entire die surface, preventing breakage that would occur with localized contact from solid push-up units

The elastic body itself acts as a flexible element that conforms to the die surface and distributes the pushing force uniformly. This flexible membrane approach replaces rigid solid structures with compliant materials that adapt to the thin die geometry, providing support and preventing mechanical failure during the separation process