Pneumatic Solvent Circulation for Semiconductor Filter Pre-Wetting
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Solution Overview
Problem
Existing pre-wetting systems for semiconductor process solution filters are inefficient and wasteful, leading to prolonged filter cleaning times and increased solvent discharge without recycling, which affects filter cleanliness and increases waste treatment costs.
Innovation Solution
A pre-wet system with a piping system, storage tank, filters, buffer tanks, and control system, utilizing gases to alternately recycle solvent between buffer tanks for reuse, optimizing solvent flow paths through control valves and sensors to ensure efficient and thorough pre-wetting and cleaning.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If the pre-wetting procedure is not thorough for an unused photoresist filter, then the system complexity is reduced, but the filter cleanliness and efficiency are greatly reduced, affecting the cleanliness of the connected pipelines
Solution Approach 1:
The pre-wetting system is divided into multiple independent buffer tanks (first buffer tank, second buffer tank) that can operate independently. Each tank can be filled and circulated separately, allowing the system to achieve thorough pre-wetting through staged processing rather than requiring a single complex high-capacity tank.
Solution Approach 2:
The system performs preliminary pre-wetting action by circulating solvent through the filter multiple times before actual use. The buffer tanks store pre-wetted solvent that has already been circulated through the filter, ensuring the filter is thoroughly cleaned in advance, which improves filter cleanliness without increasing system complexity.
2Manufacturing precision
If the filter is completely pre-wetted and cleaned before use, then the filter cleanliness and efficiency are improved, but the solvent consumption increases and waste treatment costs increase
Solution Approach 1:
The system recovers and reuses solvent that has been discharged from the filter. The buffer tanks store solvent that has passed through the filter, and this solvent can be recirculated back through the filter for continued pre-wetting of additional filters or for extending the pre-wetting process, thereby reducing overall solvent consumption and waste treatment requirements.
Solution Approach 2:
The system maintains continuous useful action by circulating solvent through the filter repeatedly. The buffer tanks enable continuous circulation without requiring constant fresh solvent input, as the same solvent can be recirculated multiple times through the filter system, reducing solvent consumption while maintaining thorough pre-wetting.
3Productivity
If the solvent is recirculated through multiple filters, then the solvent utilization efficiency is improved, but the device complexity increases due to additional piping and control systems
Solution Approach 1:
The piping system is designed with multi-functionality, where the same pipes and pumps can serve multiple purposes. The first and second buffer tanks can both receive solvent from the filter and both can supply solvent back to the filter, allowing the system to flexibly recirculate solvent through different paths without requiring completely separate dedicated piping for each function.
Solution Approach 2:
The system merges the functions of multiple buffer tanks into a coordinated recirculation system. Rather than having separate independent pre-wetting systems for each filter, the buffer tanks are integrated through common piping and control, allowing solvent to be efficiently recirculated through multiple filters using a unified system architecture that minimizes overall piping complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances filter cleanliness and reduces solvent consumption by recycling solvent between buffer tanks, thereby shortening cleaning times and decreasing waste disposal costs.
Implementation Method 1
The first gas drives the solvent in the storage tank to the filter via the piping system
Implementation Method 2
The second gas selectively drives the solvent in the first buffer tank to return to the filter and then to be discharged to the second buffer tank via the piping system
Implementation Method 3
The pump transports the solvent in the first container to the filter, which is used to remove impurities from the solvent
Data Source
AI summary
In some embodiments, a system for pre-wetting a filter includes a filter, a piping system, a first gas, a second gas, a first buffer tank, and a second buffer tank. The first gas drives the solvent to clean the filter. The two buffer tanks store the solvent discharged from the filter. The second gas selectively drives the solvent in the first buffer tank to return to the filter and then to be discharged into the second buffer tank. Alternatively, the second gas selectively drives the solvent in the second buffer tank to return to the filter and then to be discharged into the first buffer tank.