Pneumatic Spring Isolator With Nested Magnetic Actuation
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing vibration isolation systems face challenges in generating high compensation forces within a compact installation space, especially when dealing with high loads and accelerations, and struggle to effectively isolate vibrations in both vertical and horizontal directions.
Innovation Solution
A vibration isolator is designed with a pneumatic spring effective only in the vertical direction, coupled with a bending rod or articulated pendulum for horizontal isolation, and magnetic actuators to enhance vertical isolation, allowing for high force generation in a compact space by maintaining a narrow gap between the coil and magnet components.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Force
If magnetic actuators are used for active vibration isolation, then high compensation forces can be generated, but the installation space requirements increase
Solution Approach 1:
The magnetic actuator is nested within the pneumatic spring structure. The coil is arranged in the working space of the pneumatic spring, and the magnet is integrated into the piston plate or connected to the load, allowing the actuator components to occupy the same spatial envelope as the pneumatic spring without increasing overall installation space.
Solution Approach 2:
The pneumatic spring is designed to be effective only in the vertical direction, while a separate component (bending rod or articulated pendulum) handles horizontal isolation. This dimensional separation allows the magnetic actuator to focus solely on vertical compensation, reducing the space required compared to a full 3D active isolation system.
2Force
If the pneumatic spring is made rigid in the horizontal direction, then vertical isolation performance improves, but horizontal isolation capability deteriorates
Solution Approach 1:
The vibration isolation function is segmented into vertical and horizontal components. The pneumatic spring with magnetic actuator handles vertical isolation, while a separate bending rod or articulated pendulum component handles horizontal isolation. This segmentation allows each component to be optimized for its specific direction without compromise.
Solution Approach 2:
The pneumatic spring is designed with anisotropic properties: rigid in the horizontal direction to provide stable vertical support, and compliant in the vertical direction to provide active vibration isolation. The magnetic actuator is positioned to exploit the vertical compliance while the horizontal rigidity is maintained through the structural design of the pneumatic spring.
3Force
If the gap between coil and magnet is reduced to increase force, then compensation force increases, but manufacturing precision requirements increase
Solution Approach 1:
The pneumatic spring provides preliminary positioning and force balancing that maintains a stable operating point for the magnetic actuator. By actively controlling the pneumatic pressure, the system pre-compensates for variations in the magnetic gap, reducing the sensitivity to manufacturing tolerances and allowing larger practical gap dimensions.
Solution Approach 2:
The pneumatic spring acts as an intermediary between the load and the magnetic actuator, providing a compliant mounting that absorbs dimensional variations. This intermediary element decouples the precise gap requirement of the magnetic actuator from the overall system dimensions, allowing easier manufacturing while maintaining high force output.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables effective active vibration isolation with high forces in a compact space, maintaining system stability and adjusting the natural frequency for short settling times, suitable for semiconductor industry equipment.
Implementation Method 1
The membrane is fastened to the outer housing by means of the clamping ring 6 and to the inner housing 9 by means of the clamping ring 7. Due to the pressure present in the working chamber 4, which can be controlled via a pneumatic control valve (not shown), the inner housing 9 is supported pneumatically in relation to the outer housing 8 and is movable in the vertical direction due to the elasticity of the membrane 5.
Implementation Method 2
The actuator, which is preferably formed from a coil and a permanent magnet, benefits from the fact that the opposing components of the pneumatic spring, in particular an inner housing and an outer housing, do not move in the horizontal direction. The coil of the actuator preferably runs around the inner housing, is in particular pressed onto the inner housing or glued to the housing and a magnet, in particular a permanent magnet, runs along the outer housing.
Data Source
Figure 1
Figure 2
Figure 3
AI summary
The invention relates to a vibration isolator with a pneumatic spring that is only effective in the vertical direction and includes a working space in which an actuator that is effective in the vertical direction is arranged.