Pneumatic Valve Disc Control for Low-Vibration Vacuum Operation
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Solution Overview
Problem
Traditional pneumatic valves in semiconductor manufacturing and vacuum coating processes experience high-speed operation issues leading to vibration, dust contamination, valve disc sticking, and inaccurate positioning due to impact and vacuum formation, which existing solutions fail to address simultaneously.
Innovation Solution
A control method and system that adjust gas parameters using a pneumatic regulation procedure to regulate vibration and dust generation, incorporating an actuation correction structure to prevent sticking and overtravel, utilizing a vacuum breaking and reset structure to ensure smooth operation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the valve disc operates at high speed, then production efficiency is improved, but vibration is generated and dust particles are stirred up causing contamination
Solution Approach 1:
The patent applies beforehand cushioning by introducing a damping structure that is pre-positioned to absorb impact energy before the valve disc completes its stroke. The damping structure includes a damping element arranged between the valve disc and the valve body end wall, which is activated in advance during the valve disc's movement to reduce impact velocity and prevent violent collision with the end wall, thereby reducing vibration and dust contamination while maintaining high-speed operation capability
2Speed
If the valve disc is driven with strong thrust to move at high speed, then operation speed is improved, but the valve disc may exceed the predetermined stroke range due to inertia
Solution Approach 1:
The damping structure is positioned and dimensioned to engage before the valve disc reaches the end of its stroke, providing progressive resistance that slows the valve disc velocity in advance. This prevents the valve disc from exceeding the predetermined stroke range due to inertia while allowing high-speed operation during the main stroke portion, thereby maintaining both speed and positioning accuracy
3Force
If a simple mechanical buffer is used to absorb impact, then impact reduction is achieved, but the requirements of high-speed operation, low vibration, and high reliability cannot be simultaneously balanced
Solution Approach 1:
The patent employs a pneumatic damping mechanism where gas pressure is utilized to provide progressive resistance against the valve disc during its stroke. The damping structure includes a damping element that moves within a damping chamber, creating gas pressure resistance that smoothly decelerates the valve disc. This pneumatic approach provides superior impact absorption compared to simple mechanical buffers while maintaining high-speed operation capability and reducing vibration, achieving a balance between performance and complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method reduces vibration and dust, enhances operational efficiency, and ensures precise positioning by smoothing valve disc movements and preventing sticking, thus improving the reliability and performance of pneumatic valves.
Implementation Method 1
a pneumatic unit configured to drive the valve disc of the valve to perform an operation
Implementation Method 2
performing a pneumatic regulation procedure, the pneumatic regulation procedure adjusting a gas parameter supplied to the pneumatic unit in an adjustment mode when the valve disc performs the operation, so that the pneumatic unit pneumatically controls the operation of the valve disc accordingly, thereby regulating a vibration value generated by the valve
Implementation Method 3
when a valve is operated in a vacuum environment, a local vacuum state may form between the valve disc and the inner surface of the valve body when the valve disc is in an open state, leading to valve disc sticking or movement delay
Data Source
AI summary
Disclosed are a valve, a control method thereof, and a valve system. The valve is provided with a valve body and a valve disc, wherein the valve disc is driven by a pneumatic unit of the valve system to perform an operation within a chamber of the valve body. A gas is supplied to the pneumatic unit, such that the pneumatic unit controls the operation of the valve disc in a pneumatic manner according to gas parameter of the gas. Furthermore, the gas parameter provided to the pneumatic unit is adjusted to smooth the operation of the valve disc. The valve is optionally further provided with an actuation correction structure for preventing the valve disc from getting stuck.