Pod Guiding Locking Piece for Semiconductor Mask Alignment
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Solution Overview
Problem
In semiconductor wafer fabrication, the existing SMIF system's design leads to mask displacement, adhesive wear, and reduced yield rate due to friction and particle contamination between the mask and pod components.
Innovation Solution
A guiding locking piece with a flat base linked to slopes and removable locking pieces, along with a pressing buckle system, is deployed to facilitate smooth mask insertion and secure locking, reducing friction and particle contamination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If support devices and restricting devices are deployed to lock and support the mask, then the mask is secured in position, but adhesive wear and particle contamination occur due to friction between the mask and devices
Solution Approach 1:
A guiding locking piece is introduced as an intermediary component between the mask and the support/restricting devices. This guiding locking piece has a specific structure with a flat base, first slope, and second slope that guides the mask into proper position and locks it securely, thereby reducing direct friction and adhesive wear between the mask and other pod components.
2Ease of operation
If the gap between upper and lower cover members is maintained for mask insertion, then mask loading is enabled, but mask displacement occurs along the opening direction
Solution Approach 1:
The guiding locking piece is pre-installed in the pod with its flat base, first slope, and second slope positioned to guide the mask. When the mask is inserted through the gap between upper and lower cover members, the slopes automatically guide it into the correct position and the locking pieces engage to prevent displacement, eliminating the need for additional corrective actions.
3Reliability
If multiple support devices and restricting devices are used to secure the mask, then the mask is well-supported, but device complexity and friction increase
Solution Approach 1:
The guiding locking piece integrates multiple functions into a single component: it provides guiding surfaces (first slope and second slope) for mask insertion, positioning, and locking. This merged structure replaces or supplements multiple separate support devices and restricting devices, thereby reducing overall device complexity while maintaining reliable mask support and locking.
Data Source
AI summary
The present invention discloses a pod which includes a lower cover member, an upper cover member and a guiding locking piece. The guiding locking piece deployed on one side of the upper cover member of pod, the overall structure of which is formed by a flat base linking to a first slope that links to a second slope, two openings deployed on two side areas of the overall structure, and an upper locking piece and a lower locking piece deployed in each of two openings. When the mask is placed into the lower cover member of pod and is covered by the upper cover member, the mask is pushed to certain position and supported and locked by the upper locking piece and the lower locking piece.