Substrate Storage Pod Lid Buffer Space for Stable Gas Flow
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Solution Overview
Problem
Conventional substrate storage pods face challenges in achieving stable laminar replacement gas flow and preventing dust adhesion and oxidation due to limited air-supply and exhaust port sizes, which lead to flow disturbances and pressure variations.
Innovation Solution
The pod design incorporates a lid member with buffer spaces and multiple holes for stable gas distribution, along with an air-supply valve member and filter to ensure uniform gas flow, and a slide-latch mechanism that allows for optimal placement of air-supply ports, reducing flow-path resistance and pressure variations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If air-supply and exhaust ports are made large to enable efficient gas replacement, then gas replacement efficiency is improved, but the pod structure becomes more complex and harder to integrate with processing apparatus
Solution Approach 1:
The air-supply valve member is nested within the lid member structure, with the valve body integrated into the lid's thickness. The air-supply port is formed as a through-hole in the lid member, creating a compact nested arrangement that provides large gas flow capability without increasing overall pod dimensions or structural complexity
Solution Approach 2:
The lid member serves multiple functions: it seals the pod opening, houses the air-supply valve member, provides air-supply ports for gas replacement, and integrates the buffer space for pressure stabilization. This multi-functionality consolidates several components into one, improving gas replacement efficiency without increasing structural complexity
2Stability of the object's composition
If air-supply ports are positioned optimally for gas flow, then replacement gas flow stability is improved, but the lid member structure becomes more complex
Solution Approach 1:
The lid member is designed with localized functional zones: a buffer space region for pressure stabilization, air-supply port positions optimized for laminar flow entry, and valve member placement for controlled gas introduction. This local optimization of structure for specific functions achieves stable gas flow without requiring complex overall lid design
Solution Approach 2:
The buffer space acts as an intermediary chamber between the air-supply port and the pod interior. It mediates pressure variations from the gas supply system, stabilizing the replacement gas flow before it enters the pod. This intermediary structure achieves flow stability without requiring complex flow control mechanisms
3Stability of the object's composition
If buffer space volume is increased to stabilize pressure, then pressure variation is reduced, but the pod interior volume for substrates is reduced
Solution Approach 1:
The buffer space is nested within the lid member's thickness rather than occupying pod interior volume. The lid member is designed with an internal cavity for the buffer space, allowing pressure stabilization functionality to be embedded in the lid structure itself. This nesting approach provides sufficient buffer volume for pressure stability without encroaching on substrate storage space
4Device complexity
If air-supply valve member is integrated into lid member, then device complexity is reduced, but ease of maintenance and replacement becomes harder
Solution Approach 1:
The air-supply valve member is designed as a separable component that can be removed from the lid member. The valve body has a removal hole through which the valve member can be extracted, allowing it to be segmented from the lid for independent maintenance or replacement. This segmentation enables easier repair while maintaining the integrated design benefits during normal operation
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design achieves stable laminar replacement gas flow, effectively preventing dust adhesion and oxidation by uniformly exposing substrates to inert gas, ensuring high cleanliness and preventing stagnation within the pod.
Implementation Method 1
a lid member (2) fit-inserted to the opening (3a) so as to be capable of sealing the opening (3a), the lid member (2) having a buffer space (8) defined therein and having multiple holes (10) for sending out the replacement gas into the hollow inner space (3b) of the pod case (3), the replacement gas having been supplied into the buffer space (8)
Implementation Method 2
the lid member (2) having a buffer space (8) defined therein and having multiple holes (10) for sending out the replacement gas into the hollow inner space (3b) of the pod case (3)
Implementation Method 3
High cleanliness and an oxidization-resistant environment are maintained in the pod
Implementation Method 4
the replacement gas having been supplied into the buffer space (8)
Data Source
AI summary
The substrate storage pod includes a pod case for housing a substrate, and an opening, a lid member which closes and seals the opening, a buffer space which is defined in the lid member, an air-supply port for supplying a replacement gas into the buffer space; and multiple holes which are arranged so as to establish communication between the buffer space and an inner plate of the lid member in a state of being fit-inserted to the opening of the pod case, for sending out the replacement gas into the hollow inner space, the replacement gas having been supplied into the buffer space, the inner plate facing the hollow inner space of the pod case. With this, pressure variation of the replacement gas in supply pipes is blocked, and hence replacement-gas flow in a stable laminar state free from disturbance can be obtained.