Pod Lid Latch Mechanism for Dust Control
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Solution Overview
Problem
Conventional semiconductor manufacturing processes face challenges in controlling the influence of very small dust particles adhering to the lid of a pod, leading to dust generation and diffusion into the mini-environment during the opening and closing operations, which complicates maintaining a clean environment and can result in contamination.
Innovation Solution
A closed container system with a flat plate-like lid and a latch mechanism that engages through a recessed area, eliminating external operation of movable members, allowing for easy cleaning and reduced dust generation, and utilizing a seal member to prevent air and dust diffusion, with the latch mechanism designed for reliable sealing and easy maintenance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If conventional lid structures with extendable/retractable tongues and key members are used, then the lid can be engaged and disengaged from the pod body, but dust is generated during operation and diffuses into the mini-environment
Solution Approach 1:
The invention extracts the harmful key member and operated portion from the lid structure, relocating the latch mechanism to the pod body instead. This eliminates the source of dust generation (contact, rotation, and sliding of key members) while preserving the lid opening/closing function through the latch mechanism that operates without generating dust.
Solution Approach 2:
The invention introduces an intermediary latch mechanism as a mediator between the lid and pod body. Instead of direct contact between key members and operated portions on the lid, the latch mechanism on the pod body engages with the lid through a latch hole, serving as an intermediary that prevents dust-generating contact on the lid surface.
2Object-generated harmful factors
If a flat plate-like lid without external operation members is used, then dust generation is reduced and cleaning is simplified, but the lid must be reliably engaged and disengaged
Solution Approach 1:
The invention inverts the conventional approach by placing the latch mechanism on the pod body instead of on the lid. The lid becomes a passive component with only a latch hole, while the active engagement/disengagement function is performed by the latch mechanism on the pod body, eliminating the need for external operation members on the lid.
Solution Approach 2:
The latch mechanism is designed to automatically engage and disengage the lid through its own movement along the axis, without requiring external key members or operated portions. The latch main body moves to engage the engaged portion on the lid, and the roller engages the engaged recess, providing self-service functionality that maintains reliability while simplifying the lid structure.
Data Source
AI summary
In a pod used in an FIMS system, diffusion of dust particles or the like adhering on the lid of the pod to the interior of the system is reduced. An engaged portion is provided inside the outer surface of the lid of the pod, and a flange portion provided around a pod opening to which the lid can be fitted is provided with an insertion hole that allows access to the engaged portion from the exterior space. A latch mechanism is supported on the pod body side surface of the flange portion in such a way that the latch mechanism can slide along a direction parallel to the side wall of the flange. An engagement portion of the latch mechanism reaches the engaged portion through the insertion hole, and the state of the latch mechanism changes between an engaged state and a disengaged state with movement of the latch mechanism.