Point-like Beam Splitting Layer for Interferometric Microscopy

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Solution Overview

Problem

Conventional interferometric microscopy devices are complex, prone to errors, and compromise image quality due to the large number of optical elements required for interference pattern detection, making them difficult to set up and operate effectively.

Innovation Solution

An interferometric microscopy arrangement with a point-like beam splitting layer that splits the light beam into a reference and object beam after interaction with the sample, using a reduced number of optical elements, including a beam splitter, tube lenses, and a beam combiner unit, to simplify the setup and enhance image quality.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional interferometric microscopy devices use multiple optical elements for interference pattern detection, then measurement precision is improved, but device complexity increases and image quality is compromised

Engineering Contradiction:
Improveinterference pattern detection precisionVSAvoidnumber of optical elements
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent extracts the beam splitting function from a complex multi-element optical system and concentrates it into a single point-like beam splitting layer located at the focal point of the objective lens. This layer has transmittance and reflectance properties that enable it to split the light beam into reference and object beams, eliminating the need for multiple separate optical elements while maintaining measurement precision

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent combines multiple optical functions into a single integrated system. The point-like beam splitting layer simultaneously performs beam splitting, and the tube lenses for reference and object beams are integrated into a compact arrangement with the beam combiner, reducing device complexity while preserving interference pattern detection capability

Inventive Principle:
Principle #5Merging (Combining)

2Measurement precision

If conventional interferometric microscopy devices use multiple optical elements, then interference pattern detection is achieved, but ease of operation deteriorates due to difficult setup and operation

Engineering Contradiction:
Improveinterference pattern detectionVSAvoidsetup and operation difficulty
Core Design Contradiction:
Measurement precisionVSEase of operation

Solution Approach 1:

By extracting the beam splitting function to a point-like layer at the focal point, the patent simplifies the optical path alignment requirements. The tube lenses and beam combiner are arranged in a straightforward configuration that is easier to set up and operate compared to conventional multi-element systems

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent segments the optical system into distinct functional modules: the objective lens forming an image at the focal point, the point-like beam splitting layer separating beams, individual tube lenses for reference and object beams, and a beam combiner. This modular segmentation makes the system easier to assemble and operate while maintaining detection precision

Inventive Principle:
Principle #1Segmentation

3Measurement precision

If conventional interferometric microscopy devices use many optical elements, then interference pattern detection is achieved, but reliability decreases due to increased errors

Engineering Contradiction:
Improveinterference pattern detectionVSAvoiderror susceptibility
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The patent removes multiple potential error sources by extracting the beam splitting function to a single point-like layer with controlled optical properties. This eliminates alignment errors and variability associated with multiple optical elements, improving reliability while maintaining detection precision through the preserved interference pattern detection capability

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The point-like beam splitting layer is positioned at the focal point of the objective lens, where the optical path is well-defined and stable. This preliminary positioning ensures consistent beam splitting behavior and reduces errors before the beams proceed through the tube lenses and combiner, enhancing system reliability

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The simplified arrangement results in a more robust, cost-effective, and compact interferometric microscopy system that is easier to set up, with improved image quality and reduced errors, allowing for precise detection of interference patterns for sample analysis.

Implementation Method 1

The beam splitter unit has a transparent substrate and a point-like beam splitting layer which splits a part of the light beam into a reference beam and an object beam. The reference beam results from reflection at the point-like beam splitting layer and the object beam results from transmission though the point-like beam splitting layer.

Methodology Applied
Scientific EffectReflection: Reflection

Implementation Method 2

The beam splitter unit has a transparent substrate and a point-like beam splitting layer which splits a part of the light beam into a reference beam and an object beam. The reference beam results from reflection at the point-like beam splitting layer and the object beam results from transmission though the point-like beam splitting layer.

Methodology Applied
Scientific EffectTransmission:

Implementation Method 3

The beam splitter unit is configured to be positioned at a focal length of the objective lens and to receive the light beam from the objective lens.

Methodology Applied
Scientific EffectFocusing: Focusing

Implementation Method 4

detecting an interference pattern at an optical detector. The beam combiner unit is configured to receive the reference beam from the reference beam tube lens and to receive the object beam from the object beam tube lens, and to combine the reference beam and the object beam to form a pattern generating beam

Methodology Applied
Scientific EffectInterference: Interference

Data Source

PatentEP3267263B1An interferometric microscopy arrangement with a point-like beam-splitting layer
Publication Date: 2020.01.29 SIEMENS HEALTHCARE GMBH
  • EP3267263B1 patent drawingFigure 1
  • EP3267263B1 patent drawingFigure 2
  • EP3267263B1 patent drawingFigure 3~4

AI summary

An interferometric microscopy arrangement (1) is presented having an objective lens (20) that receives a light beam (9) emerging after sample interaction, wherefrom the light beam (9) is received by a beam splitter unit (30) positioned at a focal length (22) of the objective lens (20), the beam splitter unit (30) having a transparent substrate (32) and a point-like beam-splitting layer (34) that splits a part of the light beam (9) into a spatially filtered reference beam (40) and an object beam (50). Thereafter, a reference beam tube lens (60) and an object beam tube lens (70) receive the reference (40) and the object (50) beams, respectively. A beam combiner unit (80) having a transparent substrate (82) and a beam-combining layer (84) receives the reference (40) and the object (50) beams from the reference (60) and the object (70) beam tube lenses, respectively, and combines the reference (40) and the object (50) beams to form a pattern-generating beam (99) directed towards the optical detector (90) to form an interference pattern thereon.