Point-Source Film Curing Layout for Uniform Coating Thickness

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Solution Overview

Problem

Traditional film layer curing apparatuses face challenges in achieving uniform thickness distribution due to complex structures and non-uniform light intensity from long, narrow light sources, leading to increased costs and reduced productivity.

Innovation Solution

A film layer curing apparatus with a light source array comprising multiple point light sources evenly distributed on a circular surface, equipped with reflectors and sensors to ensure uniform light irradiation and adjust intensity based on thickness distribution, eliminating the need for complex rotation mechanisms.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Use of energy by moving object

If a long and narrow light source is used for curing, then the curing light can be concentrated in one direction, but the uniformity of light irradiation on the substrate surface deteriorates and the structure becomes more complex due to rotation mechanisms

Engineering Contradiction:
Improvelight concentrationVSAvoidlight irradiation uniformity
Core Design Contradiction:
Use of energy by moving objectVSManufacturing precision

Solution Approach 1:

The patent divides a single long and narrow light source into multiple point light sources arranged in an array. Each point light source independently irradiates a specific region of the substrate, and their combined effect achieves both light concentration and uniform distribution across the substrate surface, eliminating the need for rotation mechanisms.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent replaces the mechanical rotation system with a stationary light source array. Instead of rotating a single light source to achieve uniform irradiation, multiple fixed point light sources are strategically positioned to provide comprehensive and uniform coverage, simplifying the mechanical structure and improving reliability.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Manufacturing precision

If a long and narrow light source is rotated to ensure uniform irradiation, then the light distribution improves, but the device complexity and cost increase due to powerful motors and belts

Engineering Contradiction:
Improvelight irradiation uniformityVSAvoidrotation mechanism complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent segments the single rotating light source into multiple stationary point light sources arranged in an array. This segmentation eliminates the need for rotation mechanisms, motors, and belts, while achieving uniform irradiation through the strategic positioning of multiple fixed sources.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent substitutes the mechanical rotation system with a stationary optical array. The complex mechanical system involving powerful motors and belts is replaced by a fixed arrangement of point light sources that naturally provide uniform coverage without requiring any moving parts.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Device complexity

If a long and narrow light source is used, then the structure is compact, but the uniformity of film layer thickness after curing deteriorates

Engineering Contradiction:
Improvestructure compactnessVSAvoidfilm layer thickness uniformity
Core Design Contradiction:
Device complexityVSManufacturing precision

Solution Approach 1:

The patent divides the light source into multiple point sources arranged in a compact array configuration. This segmentation allows the light to be distributed evenly across the substrate surface, ensuring uniform film layer thickness while maintaining a compact overall structure without requiring large rotation mechanisms.

Inventive Principle:
Principle #1Segmentation

4Manufacturing precision

If the light source is rotated long-term, then uniform irradiation can be maintained, but the power connector and signal wire may get loose causing machine alarms

Engineering Contradiction:
Improveirradiation uniformityVSAvoidconnector reliability
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The patent replaces the rotating light source with a stationary light source array, eliminating all rotating connections. This substitution removes the reliability issues associated with long-term rotation causing loose power connectors and signal wires, while maintaining uniform irradiation through the fixed array configuration.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

5Device complexity

If the light source is not rotated, then the structure is simplified, but the uniformity of light irradiation on the substrate surface deteriorates

Engineering Contradiction:
Improvestructure simplicityVSAvoidlight irradiation uniformity
Core Design Contradiction:
Device complexityVSManufacturing precision

Solution Approach 1:

The patent segments the light source into multiple point sources arranged in a stationary array. This segmentation enables each point source to cover a specific region, and their combined effect achieves uniform irradiation across the entire substrate surface without requiring rotation, thus maintaining structural simplicity while improving uniformity.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution simplifies the apparatus structure, improves light intensity uniformity, and enhances film layer thickness distribution uniformity, thereby improving film layer quality and reducing operational costs.

Implementation Method 1

a light source array being arranged toward the support platform and covering the light outgoing surface of the entire film layer by projection of the light source array, light emitted by the light source array being able to uniformly irradiate the entire film layer

Methodology Applied
Scientific EffectLight emission: Light

Implementation Method 2

the light source component further comprises reflectors located on a side of the light source array away from the support platform to reflect light emitted by the light source array

Methodology Applied
Scientific EffectLight reflection: Reflection

Data Source

PatentUS12006573B2Film layer curing apparatus
Publication Date: 2024.06.11 CHANGXIN MEMORY TECH INC
  • US12006573B2 patent drawing
  • US12006573B2 patent drawing

AI summary

A film layer curing apparatus includes: a support platform, configured to carry a substrate having a film layer on the substrate surface; and a light source component located above the support platform, the light source component including a light source array being arranged toward the support platform and covering the light outgoing surface of the entire film layer by projection of the light source array, the light source array including multiple point light sources evenly distributed on the light outgoing surface, light emitted by the light source array being able to uniformly irradiate the entire film layer so as to improve the thickness distribution uniformity of the film layer after curing.