Polarization Module for Laser Annealing Grain Alignment
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Solution Overview
Problem
Current laser annealing methods for forming polycrystalline semiconductors, such as polycrystalline silicon, require multiple shots to achieve adequate grain alignment, which complicates the crystallization process and may not efficiently utilize the laser beam's energy.
Innovation Solution
A polarization module and laser apparatus that adjust the polarized state of a laser beam to output a beam with the same position and magnitude as the input, using a combination of lenses, polarization beam splitters, half wave plates, and prism lenses to divide and control the laser beams, reducing the number of shots needed for grain alignment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a multi-shot method is used to irradiate amorphous semiconductor layer with multiple laser shots, then grain alignment of crystallized semiconductor is increased, but process complexity increases and energy utilization efficiency decreases
Solution Approach 1:
The invention changes the polarization state parameter of the laser beam from random to linearly polarized, which fundamentally alters the interaction mechanism with the amorphous semiconductor material. This parameter change enables single-shot crystallization with high grain alignment by creating anisotropic heating that promotes directional grain growth, eliminating the need for multiple shots and simplifying the process while improving energy utilization
Solution Approach 2:
The invention applies preliminary polarization control to the laser beam before irradiation, using a polarizer to establish linear polarization in advance. This preliminary action prepares the laser energy in an optimal state for single-shot crystallization, ensuring that the subsequent irradiation delivers maximum effectiveness in one shot rather than requiring multiple sequential shots
2Manufacturing precision
If a multi-shot method is used to irradiate amorphous semiconductor layer with multiple laser shots, then grain alignment of crystallized semiconductor is increased, but energy utilization efficiency decreases
Solution Approach 1:
By changing the polarization parameter from random to linearly polarized, the invention optimizes energy coupling with the amorphous semiconductor material. The linearly polarized light creates anisotropic absorption and heating patterns that promote efficient single-shot crystallization with high grain alignment, maximizing energy utilization efficiency while achieving the desired manufacturing precision in one shot
3Shape
If polarization state of laser beam is adjusted to output beam with same position and magnitude as input, then beam shape is maintained, but optical system complexity increases
Solution Approach 1:
The polarizer component serves multiple functions simultaneously: it controls the polarization state of the laser beam, maintains the beam's spatial profile and shape, and enables single-shot crystallization. This multi-functionality reduces the need for additional separate components, thereby limiting the increase in optical system complexity while achieving the desired beam characteristics
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach simplifies the crystallization process by increasing grain alignment of polycrystalline substances while maintaining the beam's original shape and area, allowing for more efficient energy distribution and potentially extending the lifespan of the laser apparatus.
Implementation Method 1
a first lens and a second lens that reduce a one-directional length of a cross-section of an incident laser beam that is introduced with an optical axis
Implementation Method 2
A polarization beam splitter divides the laser beam passing through the first and second lenses into two laser beams that are polarized in different directions from each other
Implementation Method 3
At least one half wave plate is disposed between the polarization beam splitter and the first prism lens
Implementation Method 4
A first prism lens and a second prism lens emit an output laser beam by controlling the two laser beams that are divided by the polarization beam splitter to positions that are symmetrical with respect to the optical axis
Data Source
AI summary
A polarization module and a laser exposure apparatus have a polarization module including a first lens and a second lens that reduce a one-directional length of a cross-section of an incident laser beam having an optical axis. A polarization beam splitter divides the laser beam passing through the first and second lenses into two laser beams that are polarized in different directions with respect to each other. A first prism lens and a second prism lens emit an output laser beam by controlling the two laser beams that are divided by the polarization beam splitter to positions that are symmetrical with respect to the optical axis. At least one half wave plate is disposed between the polarization beam splitter and the first prism lens.