Simultaneous Phase-Shift Point Diffraction Interferometer

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Solution Overview

Problem

Traditional point diffraction interferometers are sensitive to environmental vibrations and disturbances due to their quasi-common optical path and traditional PZT phase shift technology, limiting their use in high-precision wave aberration measurements for imaging optical systems.

Innovation Solution

A simultaneous phase-shift point diffraction interferometer employing ideal spherical wave generation, a polarization phase shift module, and a two-dimensional polarization imaging photodetector, which uses dynamic polarization phase shift technology to suppress environmental interference and achieve high-precision measurements.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If traditional PZT phase shift technology is used in point diffraction interferometer, then phase shift capability is achieved, but sensitivity to vibration noise and air disturbance increases

Engineering Contradiction:
Improvewave aberration detection precisionVSAvoidsensitivity to vibration noise and air disturbance
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The patent replaces the traditional mechanical PZT (piezoelectric) phase shift technology with a polarization-based optical phase shift method. Instead of mechanically moving mirrors or substrates to induce phase shifts, the system uses polarization modulators to change the polarization state of light, which indirectly achieves phase shifting without mechanical movement. This substitution eliminates sensitivity to vibration noise and air disturbance while maintaining wave aberration detection precision.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the phase shift mechanism from mechanical displacement (PZT) to polarization state modulation. By controlling the polarization angle of light through polarization modulators, the system achieves phase shifts in the polarization domain rather than the mechanical domain. This parameter change from mechanical position to polarization state fundamentally reduces sensitivity to environmental vibrations and air currents.

Inventive Principle:
Principle #35Parameter changes

2Measurement precision

If quasi-common optical path system is used, then interference visibility is improved, but environmental interference sensitivity increases

Engineering Contradiction:
Improveinterference visibilityVSAvoidenvironmental interference sensitivity
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The patent replaces mechanical phase shifting with polarization-based phase shifting, which allows the system to maintain good interference visibility while reducing sensitivity to environmental factors. The polarization modulators enable phase control without requiring precise mechanical alignment, thereby maintaining interference quality while lowering environmental sensitivity.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent introduces polarization modulators as intermediary devices between the light source and the detection system. These modulators serve as a mediator that converts intensity variations into polarization state changes, enabling phase shifting without direct mechanical coupling to the optical path. This intermediary approach maintains interference visibility while isolating the system from environmental disturbances.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Measurement precision

If traditional point diffraction interferometer is used, then wave aberration measurement is possible, but adaptability to complex environments is reduced

Engineering Contradiction:
Improvewave aberration measurement capabilityVSAvoidadaptability to complex environments
Core Design Contradiction:
Measurement precisionVSAdaptability or versatility

Solution Approach 1:

The patent replaces mechanical phase shift systems with polarization-based systems, significantly improving adaptability to complex environments. The polarization modulators are less sensitive to vibration and air disturbance, allowing the interferometer to operate reliably in factories, workshops, and other environments with varying environmental conditions, while maintaining wave aberration measurement capability.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent introduces dynamic polarization modulation to enable adaptive operation in different environmental conditions. The polarization modulators can dynamically adjust the polarization state of light in real-time, allowing the system to compensate for environmental variations and maintain measurement accuracy across diverse operating conditions, thereby enhancing overall adaptability.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables high-precision wave aberration detection with reduced environmental dependence, allowing for accurate calibration and adjustment of imaging systems in complex environments.

Implementation Method 1

the polarization phase shift module is used for converting input light into output light with different polarization states, and after realizing polarization phase shift

Methodology Applied
Scientific EffectPolarization phase shift: Polarisation

Implementation Method 2

the two-dimensional polarization imaging photodetector collects and stores measurement data

Methodology Applied
Scientific EffectPhotoelectric detection: Photoelectric Effect

Implementation Method 3

the ideal spherical wave generation module is located in object field of optical system to be measured and used for generating two beams of polarized light, namely left-handed circularly polarized light and right-handed circularly polarized light

Methodology Applied
Scientific EffectSpherical wave generation:

Implementation Method 4

the filtering circular hole is used for generating reference spherical waves

Methodology Applied
Scientific EffectOptical filtering: Filter (optical)

Data Source

PatentUS11788829B2Simultaneous phase-shift point diffraction interferometer and method for detecting wave aberration
Publication Date: 2023.10.17 SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
  • US11788829B2 patent drawing
  • US11788829B2 patent drawing
  • US11788829B2 patent drawing

AI summary

A simultaneous phase-shift point diffraction interferometer and method for detecting wave aberration. The interferometer comprises an ideal spherical wave generation module, an optical system to be measured, an image plane mask, a polarization phase shift module, a two-dimensional polarization imaging photodetector and a data processing unit. Single photodetector is adopted to realize simultaneous detection of more than three phase shift interference patterns, and has the advantages that environmental interference suppression, a flexible optical path, high measurement accuracy, and calibration of system errors of the interferometer may be realized.